Abstract
The development of imprinting technique to enable formation of channels and 3-dimensional structures is presented. A polymer film is spincoated on a surfactant treated hard or soft and then transferred to a flat or patterned substrate. By choosing the appropriate polymer, mold, substrate, surface treatment, and imprinting condition, various channels and 3D structures can be generated. This channel formation and 3D patterning techniques offers high uniformity, simplicity, high resolution, and high fidelity that can be applied to a wide range of applications.
| Original language | English |
|---|---|
| Title of host publication | Digest of Papers - Microprocesses and Nanotechnology 2004 |
| Pages | 56-57 |
| Publication status | Published - 2004 |
| Externally published | Yes |
| Event | 2004 International Microprocesses and Nanotechnology Conference - Osaka, Japan Duration: 26 Oct 2004 → 29 Oct 2004 https://ieeexplore.ieee.org/xpl/conhome/9876/proceeding |
Conference
| Conference | 2004 International Microprocesses and Nanotechnology Conference |
|---|---|
| Place | Japan |
| City | Osaka |
| Period | 26/10/04 → 29/10/04 |
| Internet address |
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