Abstract
Development and preliminary characterization on the performance of a micro-bubble generator using Carbon Nanotubes (CNTs) as heating elements are presented. Dielectrophoretic force was used to align CNTs between fabricated micro-electrodes. The contacts between the CNTs and electrodes were fixed by patterned SiO2 thin film. Localized high temperature due to Joule-heating generated by an AC current of a few hundred μA (in general ≤ 100Hz) in the carbon nanotubes vaporized surrounding water and generated micron sized bubbles (with diameter of 5μm detectable under normal optical microscope). These experimental evidence indicate that exposed CNTs may function as a single nucleation site for bubble generation. The power required to generate these bubbles can be as small as 337μW, which is with 1-2 order of magnitude smaller than that of typical metal or polysilicon based MEMS heaters. Precisely controlled micro bubble generation may find promising applications in ink-jet printing, micro-fluidic visualization, or micro-fluidic based bio-manipulation. © 2006 IEEE.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS |
| Pages | 1084-1087 |
| DOIs | |
| Publication status | Published - 2006 |
| Externally published | Yes |
| Event | 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China Duration: 18 Jan 2006 → 21 Jan 2006 |
Conference
| Conference | 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS |
|---|---|
| Place | China |
| City | Zhuhai |
| Period | 18/01/06 → 21/01/06 |
Research Keywords
- Carbon nanotubes
- Dielectrophoretic manipulation
- Joule heating
- MEMS
- Microbubble generation
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