Capillarity and electromigration effects on asperity contact evolution in microelectromechanical systems switches

Ji Hee Kim; David J. Srolovitz; Pil-Ryung Cha; Jong-Kyu Yoon

doi:10.1063/1.2336488

Capillarity and electromigration effects on asperity contact evolution in microelectromechanical systems switches

Ji Hee Kim^*
, David J. Srolovitz
, Pil-Ryung Cha
, Jong-Kyu Yoon

^*Corresponding author for this work

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

9 Citations (Scopus)

Abstract

Morphology evolution of asperity contacts in microelectromechanical systems switches is examined in the framework of the phase field method. Surface mass diffusion, driven by capillarity, rapidly increases the asperity contact radius at early times, decreases it slowly at later times, and, possibly, pinches off the contact due to a Rayleigh instability. Electromigration accelerates this process but retards or prevents the pinch off at late times. The evolution occurs faster when the asperity size and/or density are smaller. Approximate analytical results for the evolution kinetics are provided.

Original language	English
Article number	054502
Journal	Journal of Applied Physics
Volume	100
Issue number	5
Online published	1 Sept 2006
DOIs	https://doi.org/10.1063/1.2336488
Publication status	Published - 1 Sept 2006
Externally published	Yes

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title = "Capillarity and electromigration effects on asperity contact evolution in microelectromechanical systems switches",

abstract = "Morphology evolution of asperity contacts in microelectromechanical systems switches is examined in the framework of the phase field method. Surface mass diffusion, driven by capillarity, rapidly increases the asperity contact radius at early times, decreases it slowly at later times, and, possibly, pinches off the contact due to a Rayleigh instability. Electromigration accelerates this process but retards or prevents the pinch off at late times. The evolution occurs faster when the asperity size and/or density are smaller. Approximate analytical results for the evolution kinetics are provided. ",

author = "Kim, \{Ji Hee\} and Srolovitz, \{David J.\} and Pil-Ryung Cha and Jong-Kyu Yoon",

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T1 - Capillarity and electromigration effects on asperity contact evolution in microelectromechanical systems switches

AU - Kim, Ji Hee

AU - Srolovitz, David J.

AU - Cha, Pil-Ryung

AU - Yoon, Jong-Kyu

PY - 2006/9/1

Y1 - 2006/9/1

N2 - Morphology evolution of asperity contacts in microelectromechanical systems switches is examined in the framework of the phase field method. Surface mass diffusion, driven by capillarity, rapidly increases the asperity contact radius at early times, decreases it slowly at later times, and, possibly, pinches off the contact due to a Rayleigh instability. Electromigration accelerates this process but retards or prevents the pinch off at late times. The evolution occurs faster when the asperity size and/or density are smaller. Approximate analytical results for the evolution kinetics are provided.

AB - Morphology evolution of asperity contacts in microelectromechanical systems switches is examined in the framework of the phase field method. Surface mass diffusion, driven by capillarity, rapidly increases the asperity contact radius at early times, decreases it slowly at later times, and, possibly, pinches off the contact due to a Rayleigh instability. Electromigration accelerates this process but retards or prevents the pinch off at late times. The evolution occurs faster when the asperity size and/or density are smaller. Approximate analytical results for the evolution kinetics are provided.

UR - https://www.scopus.com/pages/publications/33748860653

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-33748860653&origin=recordpage

U2 - 10.1063/1.2336488

DO - 10.1063/1.2336488

M3 - RGC 21 - Publication in refereed journal

SN - 0021-8979

VL - 100

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 5

M1 - 054502

ER -

Capillarity and electromigration effects on asperity contact evolution in microelectromechanical systems switches

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Erratum: “Capillarity and electromigration effects on asperity contact evolution in microelectromechanical systems switches,” [J. Appl. Phys. 100, 054502 (2006)]

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