Capacitance of high-voltage coaxial cable in plasma immersion ion implantation
- X.B. Tian
- , L.P. Wang
- , D.T.K. Kwok
- , B. Y. Tang
- , P.K. Chu*
*Corresponding author for this work
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
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