Cantilever-Based Opto-Electromechanical System Fabrication Methods

一種微懸臂光機電耦合系統加工方法

Research output: Patents, Agreements and Assignments › RGC 51 - Patents (CityU)

Overview

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Author(s)

Chaojian HOU (Inventor)
Lixin DONG (Inventor)
Kun WANG (Inventor)
Wenqi ZHANG (Inventor)

Related Research Unit(s)

Department of Biomedical Engineering

Detail(s)

Original language	English
Filing number	18/480,260
Publication status	Accepted/In press/Filed - 3 Oct 2023

Link(s)

	Check@CityULib
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(3b5ecf67-5a69-49b3-98e0-445cab25faa0).html

Citation Format(s)

[ RIS ] [ BibTeX ]

Cantilever-Based Opto-Electromechanical System Fabrication Methods. / HOU, Chaojian (Inventor); DONG, Lixin (Inventor); WANG, Kun (Inventor) et al.
Oct 03, 2023.

Research output: Patents, Agreements and Assignments › RGC 51 - Patents (CityU)

HOU, C, DONG, L , WANG, K & ZHANG, W Oct. 03 2023, Cantilever-Based Opto-Electromechanical System Fabrication Methods.

HOU, C., DONG, L., WANG, K., & ZHANG, W. (in press). Cantilever-Based Opto-Electromechanical System Fabrication Methods.

HOU C, DONG L , WANG K , ZHANG W, inventors. Cantilever-Based Opto-Electromechanical System Fabrication Methods. 2023 Oct 3.

HOU, Chaojian (Inventor) ; DONG, Lixin (Inventor) ; WANG, Kun (Inventor) et al. / Cantilever-Based Opto-Electromechanical System Fabrication Methods. Oct 03, 2023.