Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing

Victor T.S. Wong; Wen J. Li

doi:10.1109/MEMSYS.2003.1189682

Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing

Victor T.S. Wong
, Wen J. Li^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

38 Citations (Scopus)

Abstract

Bulk multi-walled carbon nanotubes (MWNT) were successfully and repeatably manipulated by AC electrophoresis to form resistive elements between Au microelectrodes and were demonstrated to potentially serve as novel temperature and anemometry sensors. We have measured the temperature coefficient of resistance (TCR) of these MWNT bundles and also integrated them into hot-film anemometry constant current configuration for dynamic characterization. It was discovered that the resulting device could be operated in μW range, which is three orders of magnitude lower than conventional MEMS polysilicon based shear stress sensors. For example, to achieve a resistance overheat ratio in the magnitude of 0.1, only 10 μA of current is needed to heat these MWNT bundle elements compare to mA current range for polysilicon-based sensors. Moreover, the device exhibited very fast frequency response (> 100 kHz) in constant current mode, which is higher than its reported MEMS polysilicon counterparts in this mode of operation. Our current processing technology is scalable in producing these MWNT sensing elements ranging from 5 μm to 15 μm in length. © 2003 IEEE

Original language	English
Title of host publication	Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
Publisher	IEEE
Pages	41-44
ISBN (Print)	0-7803-7744-3
DOIs	https://doi.org/10.1109/MEMSYS.2003.1189682
Publication status	Published - 2003
Externally published	Yes
Event	16th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2003) - Kyoto, Japan Duration: 19 Jan 2003 → 23 Jan 2003 https://ieeexplore.ieee.org/xpl/conhome/8460/proceeding

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Name
ISSN (Print)	1084-6999

Conference

Conference	16th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2003)
Place	Japan
City	Kyoto
Period	19/01/03 → 23/01/03
Internet address	https://ieeexplore.ieee.org/xpl/conhome/8460/proceeding

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@inproceedings{1769816639f345e789cd19e8d6df61e1,

title = "Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing",

abstract = "Bulk multi-walled carbon nanotubes (MWNT) were successfully and repeatably manipulated by AC electrophoresis to form resistive elements between Au microelectrodes and were demonstrated to potentially serve as novel temperature and anemometry sensors. We have measured the temperature coefficient of resistance (TCR) of these MWNT bundles and also integrated them into hot-film anemometry constant current configuration for dynamic characterization. It was discovered that the resulting device could be operated in μW range, which is three orders of magnitude lower than conventional MEMS polysilicon based shear stress sensors. For example, to achieve a resistance overheat ratio in the magnitude of 0.1, only 10 μA of current is needed to heat these MWNT bundle elements compare to mA current range for polysilicon-based sensors. Moreover, the device exhibited very fast frequency response (> 100 kHz) in constant current mode, which is higher than its reported MEMS polysilicon counterparts in this mode of operation. Our current processing technology is scalable in producing these MWNT sensing elements ranging from 5 μm to 15 μm in length. {\textcopyright} 2003 IEEE",

author = "Wong, \{Victor T.S.\} and Li, \{Wen J.\}",

year = "2003",

doi = "10.1109/MEMSYS.2003.1189682",

language = "English",

isbn = "0-7803-7744-3",

publisher = "IEEE",

pages = "41--44",

booktitle = "Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems",

address = "United States",

note = "16th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2003) ; Conference date: 19-01-2003 Through 23-01-2003",

url = "https://ieeexplore.ieee.org/xpl/conhome/8460/proceeding",

}

Wong, VTS & Li, WJ 2003, Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing. in Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems. IEEE, pp. 41-44, 16th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto, Japan, 19/01/03. https://doi.org/10.1109/MEMSYS.2003.1189682

Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing. / Wong, Victor T.S.; Li, Wen J.
Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems. IEEE, 2003. p. 41-44.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing

AU - Wong, Victor T.S.

AU - Li, Wen J.

PY - 2003

Y1 - 2003

N2 - Bulk multi-walled carbon nanotubes (MWNT) were successfully and repeatably manipulated by AC electrophoresis to form resistive elements between Au microelectrodes and were demonstrated to potentially serve as novel temperature and anemometry sensors. We have measured the temperature coefficient of resistance (TCR) of these MWNT bundles and also integrated them into hot-film anemometry constant current configuration for dynamic characterization. It was discovered that the resulting device could be operated in μW range, which is three orders of magnitude lower than conventional MEMS polysilicon based shear stress sensors. For example, to achieve a resistance overheat ratio in the magnitude of 0.1, only 10 μA of current is needed to heat these MWNT bundle elements compare to mA current range for polysilicon-based sensors. Moreover, the device exhibited very fast frequency response (> 100 kHz) in constant current mode, which is higher than its reported MEMS polysilicon counterparts in this mode of operation. Our current processing technology is scalable in producing these MWNT sensing elements ranging from 5 μm to 15 μm in length. © 2003 IEEE

AB - Bulk multi-walled carbon nanotubes (MWNT) were successfully and repeatably manipulated by AC electrophoresis to form resistive elements between Au microelectrodes and were demonstrated to potentially serve as novel temperature and anemometry sensors. We have measured the temperature coefficient of resistance (TCR) of these MWNT bundles and also integrated them into hot-film anemometry constant current configuration for dynamic characterization. It was discovered that the resulting device could be operated in μW range, which is three orders of magnitude lower than conventional MEMS polysilicon based shear stress sensors. For example, to achieve a resistance overheat ratio in the magnitude of 0.1, only 10 μA of current is needed to heat these MWNT bundle elements compare to mA current range for polysilicon-based sensors. Moreover, the device exhibited very fast frequency response (> 100 kHz) in constant current mode, which is higher than its reported MEMS polysilicon counterparts in this mode of operation. Our current processing technology is scalable in producing these MWNT sensing elements ranging from 5 μm to 15 μm in length. © 2003 IEEE

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DO - 10.1109/MEMSYS.2003.1189682

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0-7803-7744-3

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BT - Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

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Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing

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