BOOSTING Q OF <100> ALIGNED ALN-ON-SILICON LATERALLY VIBRATING RESONATORS BY WIDE ACOUSTIC BANDGAP PHONONIC CRYSTAL ANCHORS
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
| Original language | English |
|---|---|
| Title of host publication | 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. |
| Pages | 1375-1378 |
| ISBN (electronic) | 978-0-7381-2562-6, 978-1-6654-1267-4 |
| ISBN (print) | 978-1-6654-4845-1 |
| Publication status | Published - 2021 |
Publication series
| Name | International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS |
|---|---|
| ISSN (Print) | 2167-0013 |
| ISSN (electronic) | 2167-0021 |
Conference
| Title | 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021) |
|---|---|
| Location | Virtual |
| Place | United States |
| City | Orlando |
| Period | 20 - 25 June 2021 |
Link(s)
Abstract
We demonstrate the boosting of quality factor (Q) of a <100> aligned Aluminum Nitride (AlN) on Silicon (Si) laterally vibrating resonator (LVR) by using wide acoustic bandgap (ABG) phononic crystal (PnC) anchors. To date, Q-boosting strategies have been studied predominantly for the common <110> orientation. Given the anisotropy of Si, changing orientation could notably affect the effectiveness of Q-boosting strategies. We show experimentally that Qs of <100> aligned LVRs more than doubled to 10000 with the PnC anchors. To further corroborate the effectiveness of the PnCs, we also incorporated the PnCs into delay lines with wave propagation along the <100> axis, showing that the PnCs provide large acoustic attenuation of 45 dB.
Research Area(s)
- MEMS resonators, piezoelectric devices, anchor loss, phononic crystals, thin-film piezoelectric-on-silicon
Citation Format(s)
BOOSTING Q OF <100> ALIGNED ALN-ON-SILICON LATERALLY VIBRATING
RESONATORS BY WIDE ACOUSTIC BANDGAP PHONONIC CRYSTAL ANCHORS. / Yang, Renhua; Qian, Jingui; Lee, Joshua E.-Y.
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). Institute of Electrical and Electronics Engineers, Inc., 2021. p. 1375-1378 (International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS).
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). Institute of Electrical and Electronics Engineers, Inc., 2021. p. 1375-1378 (International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS).
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
