Binary excitation of a high-Q bulk acoustic microresonator by actuation polarity inversion

Joshua E.-Y. Lee; Ashwin A. Seshia

doi:10.1115/IMECE2008-67695

Binary excitation of a high-Q bulk acoustic microresonator by actuation polarity inversion

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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Abstract

We present a technique for independently exciting two resonant modes of vibration in a single-crystal silicon bulk mode microresonator using the same electrode configuration through control of the polarity of the DC actuation voltage. Applications of this technique may include built-in temperature compensation by the simultaneous selective excitation of two closely spaced modes that may have different temperature coefficients of resonant frequency. The technique is simple and requires minimum circuit overhead for implementation. The technique is implemented on square plate resonators with quality factors as high as 3.06 × 10⁶. Copyright © 2008 by ASME.

Original language	English
Title of host publication	ASME International Mechanical Engineering Congress and Exposition, Proceedings
Pages	443-448
Volume	13
DOIs	https://doi.org/10.1115/IMECE2008-67695
Publication status	Published - 2009
Externally published	Yes
Event	2008 ASME International Mechanical Engineering Congress and Exposition, IMECE 2008 - Boston, MA, United States Duration: 31 Oct 2008 → 6 Nov 2008

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Name
Volume	13

Conference

Conference	2008 ASME International Mechanical Engineering Congress and Exposition, IMECE 2008
Place	United States
City	Boston, MA
Period	31/10/08 → 6/11/08

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title = "Binary excitation of a high-Q bulk acoustic microresonator by actuation polarity inversion",

abstract = "We present a technique for independently exciting two resonant modes of vibration in a single-crystal silicon bulk mode microresonator using the same electrode configuration through control of the polarity of the DC actuation voltage. Applications of this technique may include built-in temperature compensation by the simultaneous selective excitation of two closely spaced modes that may have different temperature coefficients of resonant frequency. The technique is simple and requires minimum circuit overhead for implementation. The technique is implemented on square plate resonators with quality factors as high as 3.06 × 106. Copyright {\textcopyright} 2008 by ASME.",

author = "Lee, {Joshua E.-Y.} and Seshia, {Ashwin A.}",

year = "2009",

doi = "10.1115/IMECE2008-67695",

language = "English",

isbn = "9780791848746",

volume = "13",

pages = "443--448",

booktitle = "ASME International Mechanical Engineering Congress and Exposition, Proceedings",

note = "2008 ASME International Mechanical Engineering Congress and Exposition, IMECE 2008 ; Conference date: 31-10-2008 Through 06-11-2008",

}

Lee, JE-Y & Seshia, AA 2009, Binary excitation of a high-Q bulk acoustic microresonator by actuation polarity inversion. in ASME International Mechanical Engineering Congress and Exposition, Proceedings. vol. 13, pp. 443-448, 2008 ASME International Mechanical Engineering Congress and Exposition, IMECE 2008, Boston, MA, United States, 31/10/08. https://doi.org/10.1115/IMECE2008-67695

Binary excitation of a high-Q bulk acoustic microresonator by actuation polarity inversion. / Lee, Joshua E.-Y.; Seshia, Ashwin A.
ASME International Mechanical Engineering Congress and Exposition, Proceedings. Vol. 13 2009. p. 443-448.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Binary excitation of a high-Q bulk acoustic microresonator by actuation polarity inversion

AU - Lee, Joshua E.-Y.

AU - Seshia, Ashwin A.

PY - 2009

Y1 - 2009

N2 - We present a technique for independently exciting two resonant modes of vibration in a single-crystal silicon bulk mode microresonator using the same electrode configuration through control of the polarity of the DC actuation voltage. Applications of this technique may include built-in temperature compensation by the simultaneous selective excitation of two closely spaced modes that may have different temperature coefficients of resonant frequency. The technique is simple and requires minimum circuit overhead for implementation. The technique is implemented on square plate resonators with quality factors as high as 3.06 × 106. Copyright © 2008 by ASME.

AB - We present a technique for independently exciting two resonant modes of vibration in a single-crystal silicon bulk mode microresonator using the same electrode configuration through control of the polarity of the DC actuation voltage. Applications of this technique may include built-in temperature compensation by the simultaneous selective excitation of two closely spaced modes that may have different temperature coefficients of resonant frequency. The technique is simple and requires minimum circuit overhead for implementation. The technique is implemented on square plate resonators with quality factors as high as 3.06 × 106. Copyright © 2008 by ASME.

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M3 - RGC 32 - Refereed conference paper (with host publication)

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BT - ASME International Mechanical Engineering Congress and Exposition, Proceedings

T2 - 2008 ASME International Mechanical Engineering Congress and Exposition, IMECE 2008

Y2 - 31 October 2008 through 6 November 2008

ER -

Binary excitation of a high-Q bulk acoustic microresonator by actuation polarity inversion

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