Abstract
A Bayesian statistical approach, which is suitable for reliability estimation and projection of high k dielectric thin films and nano devices, was developed. The essential characteristics of a Bayesian approach is the explicit use of probability for quantifying uncertainty in statistical inference. The model proposed for the reliability projection of high k thin films integrates a lifetime distribution and an empirical acceleration function into a Bayesian hierarchical framework. The advantages of applying the Bayesian approach are two-fold. It can properly combine the prior knowledge of SiO 2 with the new data collected on high k and it uses probability density to model the uncertainty associated with the practical application. © 2004 IEEE
| Original language | English |
|---|---|
| Title of host publication | 2004 IEEE International Integrated Reliability Workshop Final Report |
| Publisher | IEEE |
| Pages | 186-187 |
| ISBN (Print) | 0-7803-8517-9 |
| DOIs | |
| Publication status | Published - Oct 2004 |
| Externally published | Yes |
| Event | 2004 IEEE International Integrated Reliability Workshop - South Lake Tahoe, CA, United States Duration: 18 Oct 2004 → 21 Oct 2004 |
Conference
| Conference | 2004 IEEE International Integrated Reliability Workshop |
|---|---|
| Place | United States |
| City | South Lake Tahoe, CA |
| Period | 18/10/04 → 21/10/04 |
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