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Bayesian approach to reliability projection for high k dielectric thin films

Wen Luo, Way Kuo, Yue Kuo

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

Abstract

A Bayesian statistical approach, which is suitable for reliability estimation and projection of high k dielectric thin films and nano devices, was developed. The essential characteristics of a Bayesian approach is the explicit use of probability for quantifying uncertainty in statistical inference. The model proposed for the reliability projection of high k thin films integrates a lifetime distribution and an empirical acceleration function into a Bayesian hierarchical framework. The advantages of applying the Bayesian approach are two-fold. It can properly combine the prior knowledge of SiO 2 with the new data collected on high k and it uses probability density to model the uncertainty associated with the practical application. © 2004 IEEE
Original languageEnglish
Title of host publication2004 IEEE International Integrated Reliability Workshop Final Report
PublisherIEEE
Pages186-187
ISBN (Print)0-7803-8517-9
DOIs
Publication statusPublished - Oct 2004
Externally publishedYes
Event2004 IEEE International Integrated Reliability Workshop - South Lake Tahoe, CA, United States
Duration: 18 Oct 200421 Oct 2004

Conference

Conference2004 IEEE International Integrated Reliability Workshop
PlaceUnited States
CitySouth Lake Tahoe, CA
Period18/10/0421/10/04

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