TY - GEN
T1 - Batch Fabrication of Nanotube Transducers
AU - Subramanian, Arunkumar
AU - Choi, Tae-Youl
AU - Dong, Lixin
AU - Poulikakos, Dimos
AU - Nelson, Bradley J.
PY - 2007/8
Y1 - 2007/8
N2 - Relative displacements between the atomically smooth, nested shells in multiwalled carbon nanotubes (MWNTs) can be used as a robust nanoscale motion enabling mechanism for transduction applications such as bearings, switches, GHz-oscillators, shuttles, memories, syringes and actuators. Here we report on a batch fabrication paradigm suited for structuring large arrays of MWNTs into such devices in a parallel fashion. This effort is enabled by the synergistic integration of several key processes that include dielectrophoretic assembly of individual nanotubes onto nanoelectrodes, site selective shell engineering using electric breakdown with heat dissipation modulation using nanomachined heat sinks, and on-chip characterization. We anticipate this approach to enable the manufacturability of future nanoelectromechanical systems (NEMS) with sophisticated architectures. © 2007 IEEE.
AB - Relative displacements between the atomically smooth, nested shells in multiwalled carbon nanotubes (MWNTs) can be used as a robust nanoscale motion enabling mechanism for transduction applications such as bearings, switches, GHz-oscillators, shuttles, memories, syringes and actuators. Here we report on a batch fabrication paradigm suited for structuring large arrays of MWNTs into such devices in a parallel fashion. This effort is enabled by the synergistic integration of several key processes that include dielectrophoretic assembly of individual nanotubes onto nanoelectrodes, site selective shell engineering using electric breakdown with heat dissipation modulation using nanomachined heat sinks, and on-chip characterization. We anticipate this approach to enable the manufacturability of future nanoelectromechanical systems (NEMS) with sophisticated architectures. © 2007 IEEE.
KW - Carbon nanotubes
KW - nanoassembly
KW - nanofabrication
KW - NEMS
KW - transducers
UR - http://www.scopus.com/inward/record.url?scp=52949149744&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-52949149744&origin=recordpage
U2 - 10.1109/NANO.2007.4601294
DO - 10.1109/NANO.2007.4601294
M3 - RGC 32 - Refereed conference paper (with host publication)
SN - 9781424406074
T3 - IEEE International Conference on Nanotechnology - IEEE-NANO, Proceedings
SP - 742
EP - 747
BT - 2007 7th IEEE International Conference on Nanotechnology
PB - IEEE
T2 - 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007
Y2 - 2 August 2007 through 5 August 2007
ER -
