Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit

M. Baù; M. Ferrari; V. Ferrari; A. Ali; J. E.-Y. Lee

doi:10.1007/978-3-030-37558-4_41

Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit

M. Baù^*, M. Ferrari, V. Ferrari, A. Ali, J. E.-Y. Lee

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

2 Citations (Scopus)

Original language	English
Title of host publication	Sensors and Microsystems
Subtitle of host publication	Proceedings of the 20th AISEM 2019 National Conference
Editors	G. Di Francia, C. Di Natale, B. Alfano, S. De Vito, E. Esposito, G. Fattoruso, F. Formisano, E. Massera, M. L. Miglietta, T. Polichetti
Publisher	Springer Nature
Pages	273-278
ISBN (Electronic)	978-3-030-37558-4
ISBN (Print)	978-3-030-37557-7
DOIs	https://doi.org/10.1007/978-3-030-37558-4_41
Publication status	Published - Feb 2019
Event	20th AISEM (“Associazione Italiana Sensori e Microsistemi”) National Conference on Sensors and Microsystems - Napoli, Italy Duration: 11 Feb 2019 → 13 Feb 2019

Publication series

Name	Lecture Notes in Electrical Engineering
Publisher	Springer Nature
Volume	629
ISSN (Print)	1876-1100
ISSN (Electronic)	1876-1119

Conference

Conference	20th AISEM (“Associazione Italiana Sensori e Microsistemi”) National Conference on Sensors and Microsystems
Country/Territory	Italy
City	Napoli
Period	11/02/19 → 13/02/19

Research Keywords

Piezoelectric resonators
Thin-film Piezoelectric-on-Silicon resonator
Phase-locked loop
Automatic capacitance compensation
Oscillator circuit

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Baù, M., Ferrari, M., Ferrari, V., Ali, A., & Lee, J. E.-Y. (2019). Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit. In G. Di Francia, C. Di Natale, B. Alfano, S. De Vito, E. Esposito, G. Fattoruso, F. Formisano, E. Massera, M. L. Miglietta, & T. Polichetti (Eds.), Sensors and Microsystems: Proceedings of the 20th AISEM 2019 National Conference (pp. 273-278). (Lecture Notes in Electrical Engineering; Vol. 629). Springer Nature. https://doi.org/10.1007/978-3-030-37558-4_41

Baù, M. ; Ferrari, M. ; Ferrari, V. et al. / Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit. Sensors and Microsystems: Proceedings of the 20th AISEM 2019 National Conference. editor / G. Di Francia ; C. Di Natale ; B. Alfano ; S. De Vito ; E. Esposito ; G. Fattoruso ; F. Formisano ; E. Massera ; M. L. Miglietta ; T. Polichetti. Springer Nature, 2019. pp. 273-278 (Lecture Notes in Electrical Engineering).

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title = "Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit",

keywords = "Piezoelectric resonators, Thin-film Piezoelectric-on-Silicon resonator, Phase-locked loop, Automatic capacitance compensation, Oscillator circuit",

author = "M. Ba{\`u} and M. Ferrari and V. Ferrari and A. Ali and Lee, {J. E.-Y.}",

year = "2019",

month = feb,

doi = "10.1007/978-3-030-37558-4_41",

language = "English",

isbn = "978-3-030-37557-7",

series = "Lecture Notes in Electrical Engineering",

publisher = "Springer Nature",

pages = "273--278",

editor = "{Di Francia}, G. and {Di Natale}, C. and B. Alfano and {De Vito}, S. and E. Esposito and G. Fattoruso and F. Formisano and E. Massera and Miglietta, {M. L.} and T. Polichetti",

booktitle = "Sensors and Microsystems",

note = "20th AISEM (“Associazione Italiana Sensori e Microsistemi”) National Conference on Sensors and Microsystems ; Conference date: 11-02-2019 Through 13-02-2019",

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Baù, M, Ferrari, M, Ferrari, V, Ali, A & Lee, JE-Y 2019, Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit. in G Di Francia, C Di Natale, B Alfano, S De Vito, E Esposito, G Fattoruso, F Formisano, E Massera, ML Miglietta & T Polichetti (eds), Sensors and Microsystems: Proceedings of the 20th AISEM 2019 National Conference. Lecture Notes in Electrical Engineering, vol. 629, Springer Nature, pp. 273-278, 20th AISEM (“Associazione Italiana Sensori e Microsistemi”) National Conference on Sensors and Microsystems, Napoli, Italy, 11/02/19. https://doi.org/10.1007/978-3-030-37558-4_41

Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit. / Baù, M.; Ferrari, M.; Ferrari, V. et al.
Sensors and Microsystems: Proceedings of the 20th AISEM 2019 National Conference. ed. / G. Di Francia; C. Di Natale; B. Alfano; S. De Vito; E. Esposito; G. Fattoruso; F. Formisano; E. Massera; M. L. Miglietta; T. Polichetti. Springer Nature, 2019. p. 273-278 (Lecture Notes in Electrical Engineering; Vol. 629).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit

AU - Baù, M.

AU - Ferrari, M.

AU - Ferrari, V.

AU - Ali, A.

AU - Lee, J. E.-Y.

PY - 2019/2

Y1 - 2019/2

KW - Piezoelectric resonators

KW - Thin-film Piezoelectric-on-Silicon resonator

KW - Phase-locked loop

KW - Automatic capacitance compensation

KW - Oscillator circuit

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DO - 10.1007/978-3-030-37558-4_41

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SN - 978-3-030-37557-7

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A2 - Di Natale, C.

A2 - Alfano, B.

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A2 - Esposito, E.

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A2 - Formisano, F.

A2 - Massera, E.

A2 - Miglietta, M. L.

A2 - Polichetti, T.

PB - Springer Nature

T2 - 20th AISEM (“Associazione Italiana Sensori e Microsistemi”) National Conference on Sensors and Microsystems

Y2 - 11 February 2019 through 13 February 2019

ER -

Baù M, Ferrari M, Ferrari V, Ali A , Lee JEY. Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit. In Di Francia G, Di Natale C, Alfano B, De Vito S, Esposito E, Fattoruso G, Formisano F, Massera E, Miglietta ML, Polichetti T, editors, Sensors and Microsystems: Proceedings of the 20th AISEM 2019 National Conference. Springer Nature. 2019. p. 273-278. (Lecture Notes in Electrical Engineering). doi: 10.1007/978-3-030-37558-4_41

Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit

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