Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit

M. Baù*, M. Ferrari, V. Ferrari, A. Ali, J. E.-Y. Lee

*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publicationSensors and Microsystems
Subtitle of host publicationProceedings of the 20th AISEM 2019 National Conference
EditorsG. Di Francia, C. Di Natale, B. Alfano, S. De Vito, E. Esposito, G. Fattoruso, F. Formisano, E. Massera, M. L. Miglietta, T. Polichetti
PublisherSpringer Nature
Pages273-278
ISBN (Electronic)978-3-030-37558-4
ISBN (Print)978-3-030-37557-7
DOIs
Publication statusPublished - Feb 2019
Event20th AISEM (“Associazione Italiana Sensori e Microsistemi”) National Conference on Sensors and Microsystems - Napoli, Italy
Duration: 11 Feb 201913 Feb 2019

Publication series

NameLecture Notes in Electrical Engineering
PublisherSpringer Nature
Volume629
ISSN (Print)1876-1100
ISSN (Electronic)1876-1119

Conference

Conference20th AISEM (“Associazione Italiana Sensori e Microsistemi”) National Conference on Sensors and Microsystems
Country/TerritoryItaly
CityNapoli
Period11/02/1913/02/19

Research Keywords

  • Piezoelectric resonators
  • Thin-film Piezoelectric-on-Silicon resonator
  • Phase-locked loop
  • Automatic capacitance compensation
  • Oscillator circuit

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