Automatic 3D joining in microassembly

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

9 Scopus Citations
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Author(s)

Detail(s)

Original languageEnglish
Title of host publicationProceedings of the 2007 International Conference on Information Acquisition, ICIA
Pages292-297
Publication statusPublished - 2007
Externally publishedYes

Conference

TitleInternational Conference on Information Acquisition, ICIA 2007
PlaceKorea, Republic of
CityJeju City
Period9 - 11 July 2007

Abstract

In this paper, we propose an automatic control strategy to perform joining tasks in microassembly of three-dimensional (3D) Micro-Electro-Mechanical-System (MEMS) structures, using a robotic workstation equipped with a microscope and a passive microgripper. In the proposed automatic joining scheme, the reoriented micropart, which is often not parallel with the focal plane of the microscope, is localized in 3D space with pattern matching and an auto-focus method. The joint features in the micropart and MEMS chip are aligned with a two-stage strategy. In the first stage, the MEMS chip is placed in a lower position than that of the reoriented micropart. The positions in x-y plane (parallel with the focal plane of microscope) of the joint features are determined with pattern matching method. Visual servo control is employed to align the joint features in two different parallel planes with sub-micron accuracy. In the second stage, the joint features are aligned in the z direction (along the optical axis of the microscope) with assistance of vision. The contact status of joint features is detected with the gray value of the image in the surrounding area of the tips of micropart, which changes due to the deflection of the joint feature. Experiments demonstrated the efficiency and validity of the proposed 3D joining strategy. ©2007 IEEE.

Research Area(s)

  • 3D joining, Automatic control, MEMS, Microassembly

Citation Format(s)

Automatic 3D joining in microassembly. / Wang, Lidai; Ren, Lu; Mills, James K. et al.
Proceedings of the 2007 International Conference on Information Acquisition, ICIA. 2007. p. 292-297 4295745.

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review