Automated micro-assembly of surface MEMS mirrors by centrifugal force

King W. C. Lai; P. S. Chung; Ming Li; Wen J. Li

Automated micro-assembly of surface MEMS mirrors by centrifugal force

King W. C. Lai, P. S. Chung, Ming Li, Wen J. Li

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

4 Citations (Scopus)

Abstract

A very fast, low-cost, and reliable method to assemble micro structures suitable for MOEMS (micro-opto-electro-mechanical systems) applications is reported in this paper. In general, due to the minute scale of MEMS devices, inertia force is often neglected when dealing with MEMS components. However, we have demonstrated that inertia force can be significant even if the mass of micro structure is

Original language	English
Title of host publication	Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation
Pages	23-28
Publication status	Published - 2004
Externally published	Yes
Event	2004 International Conference on Intelligent Mechatronics and Automation (ICIMA 2004) - University of Electronic Science and Technology of China (UESTC), Chengdu, China Duration: 26 Aug 2004 → 31 Aug 2004

Conference

Conference	2004 International Conference on Intelligent Mechatronics and Automation (ICIMA 2004)
Abbreviated title	ICIMA2004
Place	China
City	Chengdu
Period	26/08/04 → 31/08/04

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Research Keywords

Automated micro assembly
Batch assembly
Centrifugal assembly
Micro assembly

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@inproceedings{d577ebec414942a9b988b2715980b3d7,

title = "Automated micro-assembly of surface MEMS mirrors by centrifugal force",

abstract = "A very fast, low-cost, and reliable method to assemble micro structures suitable for MOEMS (micro-opto-electro-mechanical systems) applications is reported in this paper. In general, due to the minute scale of MEMS devices, inertia force is often neglected when dealing with MEMS components. However, we have demonstrated that inertia force can be significant even if the mass of micro structure is",

keywords = "Automated micro assembly, Batch assembly, Centrifugal assembly, Micro assembly",

author = "Lai, {King W. C.} and Chung, {P. S.} and Ming Li and Li, {Wen J.}",

year = "2004",

language = "English",

isbn = "780387481",

pages = "23--28",

booktitle = "Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation",

note = "2004 International Conference on Intelligent Mechatronics and Automation (ICIMA 2004), ICIMA2004 ; Conference date: 26-08-2004 Through 31-08-2004",

}

Automated micro-assembly of surface MEMS mirrors by centrifugal force. / Lai, King W. C.; Chung, P. S.; Li, Ming et al.
Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation. 2004. p. 23-28.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Automated micro-assembly of surface MEMS mirrors by centrifugal force

AU - Lai, King W. C.

AU - Chung, P. S.

AU - Li, Ming

AU - Li, Wen J.

PY - 2004

Y1 - 2004

N2 - A very fast, low-cost, and reliable method to assemble micro structures suitable for MOEMS (micro-opto-electro-mechanical systems) applications is reported in this paper. In general, due to the minute scale of MEMS devices, inertia force is often neglected when dealing with MEMS components. However, we have demonstrated that inertia force can be significant even if the mass of micro structure is

AB - A very fast, low-cost, and reliable method to assemble micro structures suitable for MOEMS (micro-opto-electro-mechanical systems) applications is reported in this paper. In general, due to the minute scale of MEMS devices, inertia force is often neglected when dealing with MEMS components. However, we have demonstrated that inertia force can be significant even if the mass of micro structure is

KW - Automated micro assembly

KW - Batch assembly

KW - Centrifugal assembly

KW - Micro assembly

UR - http://www.scopus.com/inward/record.url?scp=8844244803&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-8844244803&origin=recordpage

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 780387481

SP - 23

EP - 28

BT - Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation

T2 - 2004 International Conference on Intelligent Mechatronics and Automation (ICIMA 2004)

Y2 - 26 August 2004 through 31 August 2004

ER -

Automated micro-assembly of surface MEMS mirrors by centrifugal force

Abstract

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UN SDGs

Research Keywords

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