Abstract
Diffusion of atoms and molecules on surfaces plays an important role in the growth of thin films. In the present study, the surface vacancy diffusion on Cu and Ni (100) and (111) planes is investigated via atomistic simulations. This investigation is performed using the Embedded Atom Method (EAM) interatomic potentials and the finite temperature properties are determined within the local harmonic and quasiharmonic frameworks. This study helps reveal fundamentals of surface vacancy diffusion in the thin film growth. Our results show that the vacancy diffusion is important on (100) surface but it is not the dominant diffusion mechanism on (111) plane.
| Original language | English |
|---|---|
| Title of host publication | Symposium O – Phase Transformations in Thin Films–Thermodynamics |
| Publisher | Cambridge University Press |
| Pages | 355-360 |
| Volume | 311 |
| ISBN (Print) | 1558992073 |
| DOIs | |
| Publication status | Published - Apr 1993 |
| Externally published | Yes |
| Event | 1993 MRS Spring Meeting - San Francisco, United States Duration: 12 Apr 1993 → 16 Apr 1993 https://www.mrs.org/spring1993 |
Publication series
| Name | Materials Research Society Symposium Proceedings |
|---|---|
| Volume | 311 |
| ISSN (Electronic) | 0272-9172 |
Conference
| Conference | 1993 MRS Spring Meeting |
|---|---|
| Place | United States |
| City | San Francisco |
| Period | 12/04/93 → 16/04/93 |
| Internet address |
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