Area-Selective Atomic Layer Deposition : Conformal Coating, Subnanometer Thickness Control, and Smart Positioning

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

Transistor Material Science

Thick Films Material Science

Dielectric Films Material Science

Catalysis Material Science

Field Effect Transi... Material Science

Complementary Metal... Material Science

Device Fabrication Material Science

Dielectric Material Material Science

Engineering

Atomic Layer Deposi... Engineering

Conformal Coating Engineering

Processing Time Engineering

Device Performance Engineering

Deposition Process Engineering

Field-Effect Transi... Engineering

Research Group Engineering

Dielectric Layer Engineering

Industrial Applicat... Engineering

Electric Power Util... Engineering

Channel Device Engineering

Active Power Engineering

Photonics Engineering

Enabling Technology Engineering

Complementary Metal... Engineering

Device Scaling Engineering

Dielectric Films Engineering

Research OutputsResearch Output authored by Area-Selective Atomic Layer Deposition is tagged with the concept

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