Area-Selective Atomic Layer Deposition : Conformal Coating, Subnanometer Thickness Control, and Smart Positioning

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 62_Review of books or of software (or similar publications/items) › peer-review

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Engineering & Materials Science

100
Atomic layer deposi... Engineering & Materials S...
59
Thickness control Engineering & Materials S...
35
Transistors Engineering & Materials S...
27
Fabrication Engineering & Materials S...
25
Dielectric films Engineering & Materials S...
22
Field effect transi... Engineering & Materials S...
20
Thick films Engineering & Materials S...
20
Photonics Engineering & Materials S...
19
Catalysis Engineering & Materials S...
19
Industrial applicat... Engineering & Materials S...
18
Etching Engineering & Materials S...
17
Electric power util... Engineering & Materials S...
17
Electronic equipmen... Engineering & Materials S...
14
Semiconductor mater... Engineering & Materials S...
13
Coatings Engineering & Materials S...
12
Oxides Engineering & Materials S...
10
Metals Engineering & Materials S...

Physics & Astronomy

Chemistry and Materials

71
atomic layer epitax... Physics & Astronomy
15
catalysis Physics & Astronomy

Engineering

27
transistors Physics & Astronomy
20
fabrication Physics & Astronomy
14
CMOS Physics & Astronomy
13
field effect transi... Physics & Astronomy
12
etching Physics & Astronomy
11
coatings Physics & Astronomy

General

18
fins Physics & Astronomy
15
positioning Physics & Astronomy
15
thick films Physics & Astronomy
13
selectivity Physics & Astronomy
12
alignment Physics & Astronomy
11
scaling Physics & Astronomy
10
requirements Physics & Astronomy
8
electronics Physics & Astronomy

Physics

12
photonics Physics & Astronomy
10
cycles Physics & Astronomy

Chemical Compounds

89
Biotechnology Chemical Compounds
81
Acyclic Acids Chemical Compounds
63
Medical Electronics Chemical Compounds
62
beta-Amylase Chemical Compounds
61
Accessory Nerve Chemical Compounds
44
Pharmacy Licensure Chemical Compounds
35
Transistors Chemical Compounds
34
Alcuronium Chemical Compounds
33
Acetabularia Chemical Compounds
32
Caprylates Chemical Compounds
31
Cortodoxone Chemical Compounds
31
Fenitrothion Chemical Compounds
30
Achondroplasia Chemical Compounds
29
Antitubercular Agen... Chemical Compounds
27
Adrenergic beta-Ago... Chemical Compounds
25
Honey Chemical Compounds
22
Field effect transi... Chemical Compounds
20
Thick films Chemical Compounds
19
Ascorbic Acid Chemical Compounds
18
Etching Chemical Compounds
9
Psychologic Desensi... Chemical Compounds
Research OutputsResearch Output authored by Area-Selective Atomic Layer Deposition is tagged with the concept