Applying laser Doppler vibrometry to probe anchor losses in MEMS AlN-on-Si contour mode resonators

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

1 - 1 out of 1Page size: 20

Sort by: Start date

Projects

GRF: Hybridizing Phononic Crystals and Laterally Vibrating MEMS Contour Mode Resonators in Piezoelectric Aluminum Nitride on Silicon-on-Insulator Technology
LEE, E. J.
1/01/16 → 9/06/20
Project: Research