Applications of transmission electron microscopy to microstructural studies of epitaxial thin films

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Original languageEnglish
Pages (from-to)203-216
Journal / PublicationSurface and Coatings Technology
Volume37
Issue number2
Publication statusPublished - Apr 1989
Externally publishedYes

Abstract

In this paper the applications of transmission electron microscopy to microstructural studies of epitaxial thin films are reviewed. Transmission electron microscopy is a powerful technique for determining the crystallographic structures and orientation relationships between thin films and substrates. The epitaxial thin films discussed in this paper can be grown by electrochemical techniques, oxidation or electron beam evaporation. The epitaxial structures formed on various substrates by the above techniques are discussed. © 1989.