Application of spectral and temporal weighted error functions for data analysis in real-time spectroscopic ellipsometry

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Original languageEnglish
Pages (from-to)106-111
Journal / PublicationThin Solid Films
Publication statusPublished - 1 May 2004


TitleThe 3rd International Conference on Spectroscopic Ellipsometry
Period6 - 11 July 2003


In the analysis of spectroscopic ellipsometry (SE) data acquired on thin film structures, the weighted error function χ2 plays a central role, allowing one to assess the validity of the optical model used to generate the best-fit simulation. The most difficult steps in implementing χ2, however, involve the required quantification of the precision, accuracy and reproducibility of the SE measurement. In real-time SE, spectra are acquired continuously vs. time during the fabrication of thin film structures, and one has the advantage of extracting the conventional spectral averages of χ2 vs. time or the temporal averages vs. photon energy. These two measures of the validity of the optical model, not only provide insights into the fitting procedure, but also allow one to identify otherwise unrecognized errors that can account for unexplained variations in χ2. © 2003 Elsevier B.V. All rights reserved.

Research Area(s)

  • Data analysis, Experimental errors, Real-time spectroscopic ellipsometry, Silicon nitride (SiNx) film growth, Weighted error function