Anomalous DC-current-induced attenuation of Q factor in a silicon contour mode micromechanical resonator

Haoshen Zhu; Cheng Tu; Joshua Lee

doi:10.1109/EFTF-IFC.2013.6702253

Anomalous DC-current-induced attenuation of Q factor in a silicon contour mode micromechanical resonator

Haoshen Zhu^*
, Cheng Tu
, Joshua Lee

^*Corresponding author for this work

Department of Electrical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

4 Citations (Scopus)

Abstract

In this work, we report the experimental observation of quality factor (Q) variation in piezoresistively sensed silicon micromechanical resonators vibrating in a lateral contour mode. By fine tuning the bias current, the gradual descending and ascending trend of Q is distinctively observable. It shows a drastic drop in Q by nearly one order of magnitude (from 10⁵ to 10⁴) at a certain bias current level. The observed Q variation is replicable even when applying a capacitive sensing configuration with bias current running through. This anomaly is consistently detected from multiple die samples including resonators aligned along both and crystal orientations in the (100) plane. A detailed quantitative study is currently underway. © 2013 IEEE.

Original language	English
Title of host publication	2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
Pages	141-144
DOIs	https://doi.org/10.1109/EFTF-IFC.2013.6702253
Publication status	Published - 2013
Event	2013 Joint European Frequency and Time Forum and International Frequency Control Symposium (EFTF/IFC 2013) - Prague, Czech Republic Duration: 21 Jul 2013 → 25 Jul 2013

Conference

Conference	2013 Joint European Frequency and Time Forum and International Frequency Control Symposium (EFTF/IFC 2013)
Place	Czech Republic
City	Prague
Period	21/07/13 → 25/07/13

Research Keywords

microelectromechanical systems (MEMS)
micromechanical resonator
piezoresistive sensing
quality factor
single crystal silicon

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@inproceedings{a1427c523f6b46bc999779c8744a9331,

title = "Anomalous DC-current-induced attenuation of Q factor in a silicon contour mode micromechanical resonator",

abstract = "In this work, we report the experimental observation of quality factor (Q) variation in piezoresistively sensed silicon micromechanical resonators vibrating in a lateral contour mode. By fine tuning the bias current, the gradual descending and ascending trend of Q is distinctively observable. It shows a drastic drop in Q by nearly one order of magnitude (from 105 to 104) at a certain bias current level. The observed Q variation is replicable even when applying a capacitive sensing configuration with bias current running through. This anomaly is consistently detected from multiple die samples including resonators aligned along both and crystal orientations in the (100) plane. A detailed quantitative study is currently underway. {\textcopyright} 2013 IEEE.",

keywords = "microelectromechanical systems (MEMS), micromechanical resonator, piezoresistive sensing, quality factor, single crystal silicon",

author = "Haoshen Zhu and Cheng Tu and Joshua Lee",

year = "2013",

doi = "10.1109/EFTF-IFC.2013.6702253",

language = "English",

isbn = "9781479903429",

pages = "141--144",

booktitle = "2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013",

note = "2013 Joint European Frequency and Time Forum and International Frequency Control Symposium (EFTF/IFC 2013) ; Conference date: 21-07-2013 Through 25-07-2013",

}

Zhu, H, Tu, C & Lee, J 2013, Anomalous DC-current-induced attenuation of Q factor in a silicon contour mode micromechanical resonator. in 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013., 6702253, pp. 141-144, 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium (EFTF/IFC 2013), Prague, Czech Republic, 21/07/13. https://doi.org/10.1109/EFTF-IFC.2013.6702253

Anomalous DC-current-induced attenuation of Q factor in a silicon contour mode micromechanical resonator. / Zhu, Haoshen; Tu, Cheng; Lee, Joshua.
2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013. 2013. p. 141-144 6702253.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Anomalous DC-current-induced attenuation of Q factor in a silicon contour mode micromechanical resonator

AU - Zhu, Haoshen

AU - Tu, Cheng

AU - Lee, Joshua

PY - 2013

Y1 - 2013

N2 - In this work, we report the experimental observation of quality factor (Q) variation in piezoresistively sensed silicon micromechanical resonators vibrating in a lateral contour mode. By fine tuning the bias current, the gradual descending and ascending trend of Q is distinctively observable. It shows a drastic drop in Q by nearly one order of magnitude (from 105 to 104) at a certain bias current level. The observed Q variation is replicable even when applying a capacitive sensing configuration with bias current running through. This anomaly is consistently detected from multiple die samples including resonators aligned along both and crystal orientations in the (100) plane. A detailed quantitative study is currently underway. © 2013 IEEE.

AB - In this work, we report the experimental observation of quality factor (Q) variation in piezoresistively sensed silicon micromechanical resonators vibrating in a lateral contour mode. By fine tuning the bias current, the gradual descending and ascending trend of Q is distinctively observable. It shows a drastic drop in Q by nearly one order of magnitude (from 105 to 104) at a certain bias current level. The observed Q variation is replicable even when applying a capacitive sensing configuration with bias current running through. This anomaly is consistently detected from multiple die samples including resonators aligned along both and crystal orientations in the (100) plane. A detailed quantitative study is currently underway. © 2013 IEEE.

KW - microelectromechanical systems (MEMS)

KW - micromechanical resonator

KW - piezoresistive sensing

KW - quality factor

KW - single crystal silicon

UR - https://www.scopus.com/pages/publications/84893251470

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84893251470&origin=recordpage

U2 - 10.1109/EFTF-IFC.2013.6702253

DO - 10.1109/EFTF-IFC.2013.6702253

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781479903429

SP - 141

EP - 144

BT - 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013

T2 - 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium (EFTF/IFC 2013)

Y2 - 21 July 2013 through 25 July 2013

ER -

Anomalous DC-current-induced attenuation of Q factor in a silicon contour mode micromechanical resonator

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