Abstract
A study was performed on the anode double layer in magnetized radio frequency inductively coupled hydrogen plasma. The effects of the external magnetic field and anode voltage on the evolution of a cylindrical luminous anode double layer from the anode glow were evaluated. The dependence of the anode double layer structure on the magnetic field strength, neutral gas pressure and anode voltage was investigated.
| Original language | English |
|---|---|
| Pages (from-to) | 1390-1395 |
| Journal | Journal of Applied Physics |
| Volume | 94 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 1 Aug 2003 |
UN SDGs
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SDG 7 Affordable and Clean Energy
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