Abstract
The anisotropy of elastic bulk constants of wurtzite InN is analyzed theoretically on the basis of available data for elastic constants. A considerable anisotropy is evaluated both for Young's modulus and Poisson ratio of highly textured InN epitaxial films deposited on the basal plane. A comparative analysis of elastic properties is conducted for wurtzite InN, GaN and AlN. An approach is suggested for estimating vacancy concentrations on the basis of SIMS and x-ray diffraction measurements.
| Original language | English |
|---|---|
| Pages (from-to) | 79-90 |
| Journal | Defect and Diffusion Forum |
| Volume | 226-228 |
| DOIs | |
| Publication status | Published - 2004 |
| Externally published | Yes |
Research Keywords
- Elastic Anisotropy
- Point Defects
- Strain
- Wurtzite Nitrides
- X-Ray Diffraction
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