ANALYSIS OF PSG AND BPSG BY BULK AND DEPTH PROFILING METHODS

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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Author(s)

Detail(s)

Original languageEnglish
Title of host publicationThe Proceedings of the International Conference on Semiconductor and Integrated Circuit Technology
EditorsXiuying Wang, Bangxian Mo
PublisherWorld Scientific 
Pages715-722
ISBN (Print)9971501961
Publication statusPublished - Oct 1986
Externally publishedYes

Conference

TitleInternational Conference on Semiconductor and Integrated Circuit Technology
Location
PlaceChina
CityBeijing
Period20 - 23 October 1986

Citation Format(s)

ANALYSIS OF PSG AND BPSG BY BULK AND DEPTH PROFILING METHODS. / CHU, Paul K.; KLADNIK, George A. .

The Proceedings of the International Conference on Semiconductor and Integrated Circuit Technology. ed. / Xiuying Wang; Bangxian Mo. World Scientific , 1986. p. 715-722.

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review