ANALYSIS OF PSG AND BPSG BY BULK AND DEPTH PROFILING METHODS
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
Detail(s)
| Original language | English |
|---|---|
| Title of host publication | The Proceedings of the International Conference on Semiconductor and Integrated Circuit Technology |
| Editors | Xiuying Wang, Bangxian Mo |
| Publisher | World Scientific |
| Pages | 715-722 |
| ISBN (print) | 9971501961 |
| Publication status | Published - Oct 1986 |
| Externally published | Yes |
Conference
| Title | International Conference on Semiconductor and Integrated Circuit Technology |
|---|---|
| Location | |
| Place | China |
| City | Beijing |
| Period | 20 - 23 October 1986 |
Link(s)
| Permanent Link | https://scholars.cityu.edu.hk/en/publications/publication(a783fc05-3660-43f0-b133-71f6cfc2e451).html |
|---|
Citation Format(s)
ANALYSIS OF PSG AND BPSG BY BULK AND DEPTH PROFILING METHODS. / CHU, Paul K.; KLADNIK, George A. .
The Proceedings of the International Conference on Semiconductor and Integrated Circuit Technology. ed. / Xiuying Wang; Bangxian Mo. World Scientific , 1986. p. 715-722.
The Proceedings of the International Conference on Semiconductor and Integrated Circuit Technology. ed. / Xiuying Wang; Bangxian Mo. World Scientific , 1986. p. 715-722.
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
