Analysis of optimal inclined angles on V-shaped electro-thermal microactuators

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)155-162
Journal / PublicationJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Volume23
Issue number2
Publication statusPublished - Apr 2002
Externally publishedYes

Abstract

An electro-thermal microactuator is investigated in the present study. The micromachined device is activated by thermal expansion of a V-shaped bent beam anchored at the two ends while an electric current is passed through the beam. Thermal stress caused by joule heating pushes the apex forward, generating large tip displacements and output forces. Finite element analysis is first applied to analyze the temperature field, strain distribution, tip displacements and output forces of the beam. Then, polysilicon surface-micromachining technique is used to fabricate the devices and experimental data are compared with the numerical results. In addition to a single V-shaped bent-beam structure, a cascaded bent-beam structure to amplify the tip displacement is also investigated. It is found that there exists an optimum inclined angle for single and cascaded bent beams to generate maximum tip displacements and output forces. The angle strongly depends on the bent beam geometry, The bent-beam actuators capable of generating large displacements (up to 60 μm) and output forces (up to several mN) show great potential in implementing in a variety of microsystems.

Research Area(s)

  • Electro-thermal actuators, MEMS, Micro bent-beam actuators, Micromachining

Bibliographic Note

Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

Citation Format(s)

Analysis of optimal inclined angles on V-shaped electro-thermal microactuators. / Lee, Gwo-Bin; Chen, Rong-Sheng; Kung, Chieh J.
In: Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao, Vol. 23, No. 2, 04.2002, p. 155-162.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review