Analysis of nano-scratch behavior of diamond-like carbon films

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Li-Ye Huang
  • Ke-Wei Xu
  • Jian Lu
  • Bruno Guelorget

Detail(s)

Original languageEnglish
Pages (from-to)232-236
Journal / PublicationSurface and Coatings Technology
Volume154
Issue number2-3
Publication statusPublished - 15 May 2002
Externally publishedYes

Abstract

The nano-scratch behavior of diamond-like carbon films prepared on Ti alloy substrates by r.f. PECVD was analyzed using a Nano Indenter0 XP system with the attachment of lateral force measurement in order to understand the deformation mechanism of the films. It was concluded that the three processes that occur successively with the increase of load during the scratching are fully elastic recovery, plastic deformation, and delamination of the films. In the first regime, no damage could be found on the surface of the films. In the second regime, due to the asynchronous recovery of the films and the substrates, a trace-like fish bone composed of tiny cracks along the track of the indenter was formed. It was only in the third regime when the critical load was obtained that the partial spallation of the films was detected with careful examination. It was determined that the film spallation originated from the fish bone cracking, and the fish bone was just a profiling of the Berkovich indenter. © 2002 Elsevier Science B.V. All rights reserved.

Research Area(s)

  • Diamond-like carbon (DLC), Nano-scratch, Nanoindentation

Citation Format(s)

Analysis of nano-scratch behavior of diamond-like carbon films. / Huang, Li-Ye; Xu, Ke-Wei; Lu, Jian; Guelorget, Bruno.

In: Surface and Coatings Technology, Vol. 154, No. 2-3, 15.05.2002, p. 232-236.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review