TY - GEN
T1 - Analysis and Experiments for Fracture-Controlled Fabrication of Nanocoils
AU - Bell, Dominik
AU - Dong, Lixin
AU - Golling, Matthias
AU - Zhang, Li
AU - Nelson, Bradley
AU - Gruetzmacher, Detlev
N1 - Publication information for this record has been verified with the author(s) concerned.
PY - 2006/4
Y1 - 2006/4
N2 - This paper presents further work to improve the control over self-formed threedimensional (3D) nanostructures. In particular, the control over the fabrication of nanocoils is improved in order to allow for the fabrication of nanocoils with small pitch. The small pitch guarantees higher inductance and quality factor for inductors, as well as higher resolution and range for electromechanical sensors. The process is based on conventional microfabrication techniques to define a planar pattern in a bilayer that subsequently scrolls up into a 3D nanostructure. A fracture layer is used to control the direction of scrolling. Control over the thickness of the fracture layer is crucial for this process. Therefore, an analytical model has been developed to estimate the maximum allowable thickness of the fracture layer for given bilayer properties. Results from the fabrication of the structures are demonstrated, and the mechanical properties of the structures have been investigated through finite element simulation.© 2006 by ScienceTechnica, Inc.
AB - This paper presents further work to improve the control over self-formed threedimensional (3D) nanostructures. In particular, the control over the fabrication of nanocoils is improved in order to allow for the fabrication of nanocoils with small pitch. The small pitch guarantees higher inductance and quality factor for inductors, as well as higher resolution and range for electromechanical sensors. The process is based on conventional microfabrication techniques to define a planar pattern in a bilayer that subsequently scrolls up into a 3D nanostructure. A fracture layer is used to control the direction of scrolling. Control over the thickness of the fracture layer is crucial for this process. Therefore, an analytical model has been developed to estimate the maximum allowable thickness of the fracture layer for given bilayer properties. Results from the fabrication of the structures are demonstrated, and the mechanical properties of the structures have been investigated through finite element simulation.© 2006 by ScienceTechnica, Inc.
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M3 - RGC 32 - Refereed conference paper (with host publication)
T3 - Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices
SP - 12
EP - 18
BT - 3rd Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2006
T2 - 3rd Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2006
Y2 - 23 April 2006 through 27 April 2006
ER -
