Analysis and design of a self-powered piezoelectric microaccelerometer

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

35 Scopus Citations
View graph of relations



Original languageEnglish
Article number31
Pages (from-to)233-240
Journal / PublicationProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2005
Externally publishedYes


TitleSmart Structures and Materials 2005 - Smart Electronics, MEMS,, BioMEMS, and Nanotechnology
PlaceUnited States
CitySan Diego, CA
Period7 - 10 March 2005


Power consumption is a critical concern of many sensors used in diversified applications, especially where the replacement of batteries is impossible or inconvenient. Strain energy harvesting technique is an attractive approach to solve this problem using piezoelectric materials. The feasibility of a self-powered piezoelectric microaccelerometer system using lead zirconate titanate (PZT) thin film is studied in this paper. Since the electromechanical coefficient d33 of PZT is larger than d31, and the transverse (33 mode) mode is also easier to fabricate, our design and analysis are focused on the transverse mode in constructing the PZT-based self-powered microsystem. The PZT-based cantilever structure with interdigitated electrodes and silicon seismic mass at the free end are designed to have specific resonance frequencies ranging from tens to thousands of hertz. The capability of energy storage and acceleration sensitivity in the proposed microaccelerometer are concurrently evaluated. A trade-off exists between these two major functions and the desirable operating frequency of the proposed system, i.e., the compromise depends on the demands of particular applications.

Research Area(s)

  • Energy harvesting, Microaccelerometer, Piezoelectric sensor, Remote sensing, Self-powered