An ultra-sensitive piezoelectric-on-silicon flapping mode MEMS lateral field magnetometer
Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with ISBN/ISSN) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
| Original language | English |
|---|---|
| Title of host publication | 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC) - Proceedings |
| Publisher | IEEE |
| Pages | 502-505 |
| ISBN (Print) | 9781538629161 |
| Publication status | Published - Jul 2017 |
Conference
| Title | 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) |
|---|---|
| Place | France |
| City | Besancon |
| Period | 9 - 13 July 2017 |
Link(s)
Abstract
We experimentally demonstrate the sensing of lateral magnetic fields using the piezoelectric effect in a resonant MEMS thin-film piezoelectric-on-silicon (TPoS) CMOS-compatible magnetometer. The proposed out-of-plane flapping resonant mode offers strong electromechanical coupling through the piezoelectric Aluminum Nitride (AlN) transducer to enhance the responsivity of the device while operating at atmospheric pressure. The responsivity is here defined as the ratio of output motional current to the external magnetic field strength, normalized over the input excitation current of the device. We have experimentally measured a responsivity of 12156 ppm/T while operating the device at a resonant frequency of 159 kHz, despite even an air-damped quality factor of 526 under ambient conditions.
Research Area(s)
- flapping mode, Lorentz force MEMS magnetometer, responsivity, thin-film piezoelectric-on-silicon (TPoS)
Citation Format(s)
An ultra-sensitive piezoelectric-on-silicon flapping mode MEMS lateral field magnetometer. / Ghosh, Sagnik; Lee, Joshua E.-Y.
2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC) - Proceedings. IEEE, 2017. p. 502-505 8088942.Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with ISBN/ISSN) › peer-review
