An integrated MEMS three-dimensional tactile sensor with large force range

Tao Mei; Wen J. Li; Yu Ge; Yong Chen; Lin Ni; Ming Ho Chan

doi:10.1016/S0924-4247(99)00261-7

An integrated MEMS three-dimensional tactile sensor with large force range

Tao Mei
, Wen J. Li
, Yu Ge
, Yong Chen
, Lin Ni
, Ming Ho Chan

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

145 Citations (Scopus)

Abstract

An integrated three-dimensional tactile sensor with robust MEMS structure and soft contact surface suitable for robotic applications was developed. The sensor has a maximum force range of 50 N in the vertical direction and ±10 N in the x and y horizontal directions. The tactile sensor includes 4×8 sensing cells each exhibiting an independent, linear response to the three components of forces applied on the cells. By finite element analysis, optimal cell structures and piezoresistor positions were determined. Post bulk-micromachining was performed on foundry-fabricated CMOS chips to produce the sensor cells. With neural network training, the tactile sensor produced reliable three-dimensional force measurements and repeatable response on tactile images. Design analysis, fabrication procedures, and experimental results are presented in this paper.

Original language	English
Pages (from-to)	155-162
Journal	Sensors and Actuators, A: Physical
Volume	80
Issue number	2
DOIs	https://doi.org/10.1016/S0924-4247(99)00261-7
Publication status	Published - 10 Mar 2000
Externally published	Yes
Event	12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99) - Orlando, FL, USA Duration: 17 Jan 1999 → 21 Jan 1999

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title = "An integrated MEMS three-dimensional tactile sensor with large force range",

abstract = "An integrated three-dimensional tactile sensor with robust MEMS structure and soft contact surface suitable for robotic applications was developed. The sensor has a maximum force range of 50 N in the vertical direction and ±10 N in the x and y horizontal directions. The tactile sensor includes 4×8 sensing cells each exhibiting an independent, linear response to the three components of forces applied on the cells. By finite element analysis, optimal cell structures and piezoresistor positions were determined. Post bulk-micromachining was performed on foundry-fabricated CMOS chips to produce the sensor cells. With neural network training, the tactile sensor produced reliable three-dimensional force measurements and repeatable response on tactile images. Design analysis, fabrication procedures, and experimental results are presented in this paper.",

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TY - JOUR

T1 - An integrated MEMS three-dimensional tactile sensor with large force range

AU - Mei, Tao

AU - Li, Wen J.

AU - Ge, Yu

AU - Chen, Yong

AU - Ni, Lin

AU - Chan, Ming Ho

PY - 2000/3/10

Y1 - 2000/3/10

N2 - An integrated three-dimensional tactile sensor with robust MEMS structure and soft contact surface suitable for robotic applications was developed. The sensor has a maximum force range of 50 N in the vertical direction and ±10 N in the x and y horizontal directions. The tactile sensor includes 4×8 sensing cells each exhibiting an independent, linear response to the three components of forces applied on the cells. By finite element analysis, optimal cell structures and piezoresistor positions were determined. Post bulk-micromachining was performed on foundry-fabricated CMOS chips to produce the sensor cells. With neural network training, the tactile sensor produced reliable three-dimensional force measurements and repeatable response on tactile images. Design analysis, fabrication procedures, and experimental results are presented in this paper.

AB - An integrated three-dimensional tactile sensor with robust MEMS structure and soft contact surface suitable for robotic applications was developed. The sensor has a maximum force range of 50 N in the vertical direction and ±10 N in the x and y horizontal directions. The tactile sensor includes 4×8 sensing cells each exhibiting an independent, linear response to the three components of forces applied on the cells. By finite element analysis, optimal cell structures and piezoresistor positions were determined. Post bulk-micromachining was performed on foundry-fabricated CMOS chips to produce the sensor cells. With neural network training, the tactile sensor produced reliable three-dimensional force measurements and repeatable response on tactile images. Design analysis, fabrication procedures, and experimental results are presented in this paper.

UR - https://www.scopus.com/pages/publications/0033874015

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U2 - 10.1016/S0924-4247(99)00261-7

DO - 10.1016/S0924-4247(99)00261-7

M3 - RGC 21 - Publication in refereed journal

SN - 0924-4247

VL - 80

SP - 155

EP - 162

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 2

T2 - 12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99)

Y2 - 17 January 1999 through 21 January 1999

ER -

An integrated MEMS three-dimensional tactile sensor with large force range

Abstract

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