An experimental study of fracture of LIGA Ni micro-electro-mechanical systems thin films

Y. Yang; S. Allameh; B. Boyce; K. S. Chan; W. O. Soboyejo

doi:10.1007/s11661-007-9147-0

An experimental study of fracture of LIGA Ni micro-electro-mechanical systems thin films

Y. Yang, S. Allameh, B. Boyce, K. S. Chan, W. O. Soboyejo

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

12 Citations (Scopus)

Abstract

This article presents the results of an experimental study of fracture in LIGA Ni micro-electro-mechanical systems (MEMS) thin films. Microtesting techniques are developed for the study of the J-resistance curve (J-Δa) behavior in compact tension (CT) thin film specimens. In-situ measurements of crack-tip strain are presented together with in-situ and ex-situ microscopic images of crack-tip deformation and fracture mechanisms. Fractographic observation showed a mixture of inclined fracture planes (slant fracture) that are relatively featureless and normal fracture planes that exhibit dimples and microholes resulting from plastic deformation. © The Minerals, Metals & Materials Society and ASM International 2007.

Original language	English
Pages (from-to)	1223-1230
Journal	Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science
Volume	38
Issue number	6
DOIs	https://doi.org/10.1007/s11661-007-9147-0
Publication status	Published - Jun 2007
Externally published	Yes

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@article{809cef29acd344a2ac2f5894f2cef511,

title = "An experimental study of fracture of LIGA Ni micro-electro-mechanical systems thin films",

abstract = "This article presents the results of an experimental study of fracture in LIGA Ni micro-electro-mechanical systems (MEMS) thin films. Microtesting techniques are developed for the study of the J-resistance curve (J-Δa) behavior in compact tension (CT) thin film specimens. In-situ measurements of crack-tip strain are presented together with in-situ and ex-situ microscopic images of crack-tip deformation and fracture mechanisms. Fractographic observation showed a mixture of inclined fracture planes (slant fracture) that are relatively featureless and normal fracture planes that exhibit dimples and microholes resulting from plastic deformation. {\textcopyright} The Minerals, Metals & Materials Society and ASM International 2007.",

author = "Y. Yang and S. Allameh and B. Boyce and Chan, {K. S.} and Soboyejo, {W. O.}",

year = "2007",

month = jun,

doi = "10.1007/s11661-007-9147-0",

language = "English",

volume = "38",

pages = "1223--1230",

journal = "Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science",

issn = "1073-5623",

publisher = "Springer Boston",

number = "6",

}

An experimental study of fracture of LIGA Ni micro-electro-mechanical systems thin films. / Yang, Y.; Allameh, S.; Boyce, B. et al.
In: Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science, Vol. 38, No. 6, 06.2007, p. 1223-1230.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

TY - JOUR

T1 - An experimental study of fracture of LIGA Ni micro-electro-mechanical systems thin films

AU - Yang, Y.

AU - Allameh, S.

AU - Boyce, B.

AU - Chan, K. S.

AU - Soboyejo, W. O.

PY - 2007/6

Y1 - 2007/6

N2 - This article presents the results of an experimental study of fracture in LIGA Ni micro-electro-mechanical systems (MEMS) thin films. Microtesting techniques are developed for the study of the J-resistance curve (J-Δa) behavior in compact tension (CT) thin film specimens. In-situ measurements of crack-tip strain are presented together with in-situ and ex-situ microscopic images of crack-tip deformation and fracture mechanisms. Fractographic observation showed a mixture of inclined fracture planes (slant fracture) that are relatively featureless and normal fracture planes that exhibit dimples and microholes resulting from plastic deformation. © The Minerals, Metals & Materials Society and ASM International 2007.

AB - This article presents the results of an experimental study of fracture in LIGA Ni micro-electro-mechanical systems (MEMS) thin films. Microtesting techniques are developed for the study of the J-resistance curve (J-Δa) behavior in compact tension (CT) thin film specimens. In-situ measurements of crack-tip strain are presented together with in-situ and ex-situ microscopic images of crack-tip deformation and fracture mechanisms. Fractographic observation showed a mixture of inclined fracture planes (slant fracture) that are relatively featureless and normal fracture planes that exhibit dimples and microholes resulting from plastic deformation. © The Minerals, Metals & Materials Society and ASM International 2007.

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U2 - 10.1007/s11661-007-9147-0

DO - 10.1007/s11661-007-9147-0

M3 - RGC 21 - Publication in refereed journal

SN - 1073-5623

VL - 38

SP - 1223

EP - 1230

JO - Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science

JF - Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science

IS - 6

ER -

An experimental study of fracture of LIGA Ni micro-electro-mechanical systems thin films

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