An efficient approach of handling and deposition of micro and nano entities using sensorized microfluidic end-effector system

This paper presents a novel approach of handling and deposition of micro and nano entities using a microfluidic end effector system with in situ polyvinylidene fluoride (PVDF) sensing. The microfluidic end effector system consists of a DC micro-diaphragm pump, one region of flexible latex tube, a polyvinylidene fluoride (PVDF) sensor for in situ measurement of micro drag force, and a micropipette. The micropipette of the novel microfluidic end effector system has an internal diameter (ID) smaller than 20μ m which is used for microfluidic handling and deposition of submicron entities such as carbon nanotubes and DNA. The DC micro-diaphragm pump is automatically controlled via a voltage driver interfaced with a computer in order to effectively and efficiently control suction force and pressure during microfluidic handling and droplet control in micro and nano manufacturing. The design, calibration, and experimental implementation of the novel microfluidic end effector are carried out in the paper. The experimental results show the success rate for depositing carbon nanotubes between micro electrodes can reach close to 80%. Ultimately, the technology will provide a critical and major step towards the development of automated process for manufacturing of micro and nanoelectronics as well as for microfluidic droplet control, and drug delivery. © 2008 Elsevier B.V. All rights reserved.