An axial strain modulated double-ended tuning fork electrometer

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)395-400
Journal / PublicationSensors and Actuators, A: Physical
Volume148
Issue number2
Publication statusPublished - 3 Dec 2008
Externally publishedYes

Abstract

This paper reports a micromechanical electrometer that uses a single-crystal silicon double-ended tuning fork resonator as the charge sensing element. Addition of a charge across an input capacitor induces a tensile axial strain in the resonating tines, resulting in a shift in the resonant frequency. The resonator has a nominal resonant frequency of 154 kHz and quality factor of 80,000 at room temperature and a pressure of just under 4 mTorr. The resonator has been embedded inside a closed loop circuit to realize a nonlinear oscillator with a short-term frequency deviation of 3.1 mHz (20 ppb). This yields a minimum measurable charge of 4 fC, equivalent to a noise force of 0.725 nN and strain resolution of 23.4 pε, set by the electronic noise of the oscillator circuit. © 2008 Elsevier B.V. All rights reserved.

Research Area(s)

  • Electrometer, Resonator oscillator, Silicon-on-insulator (SOI) process, Strain sensor

Citation Format(s)

An axial strain modulated double-ended tuning fork electrometer. / Lee, Joshua E.-Y.; Bahreyni, Behraad; Seshia, Ashwin A.
In: Sensors and Actuators, A: Physical, Vol. 148, No. 2, 03.12.2008, p. 395-400.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review