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An asymmetric PI hysteresis model for piezoceramics in nanoscale AFM imaging

  • Dong Wang
  • , Zaili Dong
  • , Niandong Jiao
  • , Shuai Yuan
  • , Lei Zhou
  • , Wen J. Li*
  • *Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

Abstract

A modified Prandtl-Ishlinskii (PI) model, referred to as an asymmetric PI model, is implemented to reduce the displacement error between the model and the actual trajectory of a piezoceramic actuator used for AFM-based nanoscale imaging. The fact that the standard PI model is symmetric, while the actual hysteresis loop of a piezoceramic actuator is asymmetric, assures scanning errors if the standard PI operator is used. In order to improve the accuracy of the model, instead of using the same slope values in the entire PI model, different slope values to describe the forward loop (voltage increase) and the backward loop (voltage decrease) is proposed. The accuracy of the asymmetric PI model is validated on a custom-built AFM by comparing the experimental results derived from it with the results for the standard PI model. © 2011 IEEE.
Original languageEnglish
Title of host publicationNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages1075-1079
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan, China
Duration: 20 Feb 201123 Feb 2011

Conference

Conference6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
PlaceTaiwan, China
CityKaohsiung
Period20/02/1123/02/11

Research Keywords

  • AFM hysteresis
  • AFM imaging
  • nano-imaging
  • Nano-manipulation
  • piezo-actuator

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