Amorphous CNx films prepared by electrochemical deposition
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Author(s)
Detail(s)
Original language | English |
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Pages (from-to) | 98-102 |
Journal / Publication | Materials Letters |
Volume | 38 |
Issue number | 2 |
Publication status | Published - Jan 1999 |
Link(s)
Abstract
Amorphous carbon nitride (CNx) films have been synthesized by electrochemical deposition on positive biased silicon substrates at room temperature. The films adhere well to the Si substrates, but are softer than Si and have many cracks. Multiple binding energy values obtained for the C 1s and N 1s photoelectrons in the film suggest that the C and N atoms both exhibit three chemical states. The Fourier transformation infrared spectroscopy for the film shows four main bands at 1351 cm-1, 1660 cm-1 2147 cm-1 and 3220 cm-1, respectively. The N to C concentration ratio was estimated to be 0.1. Red color photoluminescence with a peak at ~630 nm has been observed in the prepared CNx films.
Research Area(s)
- 68.55-a, 81.15Lm, Amorphous films, Carbon nitride, Electrochemical deposition
Citation Format(s)
Amorphous CNx films prepared by electrochemical deposition. / Sun, Jianwei; Zhang, Yafei; He, Xiaoxia et al.
In: Materials Letters, Vol. 38, No. 2, 01.1999, p. 98-102.
In: Materials Letters, Vol. 38, No. 2, 01.1999, p. 98-102.
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review