Amorphous CNx films prepared by electrochemical deposition

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Author(s)

  • Jianwei Sun
  • Yafei Zhang
  • Xiaoxia He
  • Weimin Liu
  • S. T. Lee

Detail(s)

Original languageEnglish
Pages (from-to)98-102
Journal / PublicationMaterials Letters
Volume38
Issue number2
Publication statusPublished - Jan 1999

Abstract

Amorphous carbon nitride (CNx) films have been synthesized by electrochemical deposition on positive biased silicon substrates at room temperature. The films adhere well to the Si substrates, but are softer than Si and have many cracks. Multiple binding energy values obtained for the C 1s and N 1s photoelectrons in the film suggest that the C and N atoms both exhibit three chemical states. The Fourier transformation infrared spectroscopy for the film shows four main bands at 1351 cm-1, 1660 cm-1 2147 cm-1 and 3220 cm-1, respectively. The N to C concentration ratio was estimated to be 0.1. Red color photoluminescence with a peak at ~630 nm has been observed in the prepared CNx films.

Research Area(s)

  • 68.55-a, 81.15Lm, Amorphous films, Carbon nitride, Electrochemical deposition

Citation Format(s)

Amorphous CNx films prepared by electrochemical deposition. / Sun, Jianwei; Zhang, Yafei; He, Xiaoxia et al.
In: Materials Letters, Vol. 38, No. 2, 01.1999, p. 98-102.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review