AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors

Haoshen Zhu; Joshua E.-Y. Lee

doi:10.1109/MEMSYS.2015.7051079

AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

67 Citations (Scopus)

Abstract

We report an approach to suppress anchor loss in thin-film piezoelectric-on-silicon (TPoS) micromechanical (MEMS) resonators by patterning 2D phononic crystals (PnCs) externally on the anchors. The PnCs serve as a frequency-selective reflector for outgoing acoustic waves through the tethers of the TPoS resonator. According to our experimental results, combining the PnCs with the conventional TPoS resonator significantly enhances the quality factor (Q) and correspondingly lowers the insertion loss (IL). The measured improvement is reproducible over multiple samples and consistent with the simulations by tuning the PnC bandgaps, suggesting significant reduction of acoustic leakage to the substrate by adopting the PnCs.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	IEEE
Pages	797-800
Edition	Jan 2015
ISBN (Electronic)	978-1-4799-7955-4
ISBN (Print)	978-1-4799-7954-7, 978-1-4799-7956-1
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051079
Publication status	Published - Jan 2015
Event	28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015) - Estoril Congress Center, Estoril, Portugal Duration: 18 Jan 2015 → 22 Jan 2015

Conference

Conference	28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)
Place	Portugal
City	Estoril
Period	18/01/15 → 22/01/15

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@inproceedings{8da028fbf7f74be7a7822db272e6da25,

title = "AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors",

abstract = "We report an approach to suppress anchor loss in thin-film piezoelectric-on-silicon (TPoS) micromechanical (MEMS) resonators by patterning 2D phononic crystals (PnCs) externally on the anchors. The PnCs serve as a frequency-selective reflector for outgoing acoustic waves through the tethers of the TPoS resonator. According to our experimental results, combining the PnCs with the conventional TPoS resonator significantly enhances the quality factor (Q) and correspondingly lowers the insertion loss (IL). The measured improvement is reproducible over multiple samples and consistent with the simulations by tuning the PnC bandgaps, suggesting significant reduction of acoustic leakage to the substrate by adopting the PnCs.",

author = "Haoshen Zhu and Lee, {Joshua E.-Y.}",

year = "2015",

month = jan,

doi = "10.1109/MEMSYS.2015.7051079",

language = "English",

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pages = "797--800",

booktitle = "2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

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edition = "Jan 2015",

note = "28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015) ; Conference date: 18-01-2015 Through 22-01-2015",

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Zhu, H & Lee, JE-Y 2015, AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Jan 2015 edn, IEEE, pp. 797-800, 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), Estoril, Portugal, 18/01/15. https://doi.org/10.1109/MEMSYS.2015.7051079

AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors. / Zhu, Haoshen; Lee, Joshua E.-Y.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Jan 2015. ed. IEEE, 2015. p. 797-800.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors

AU - Zhu, Haoshen

AU - Lee, Joshua E.-Y.

PY - 2015/1

Y1 - 2015/1

N2 - We report an approach to suppress anchor loss in thin-film piezoelectric-on-silicon (TPoS) micromechanical (MEMS) resonators by patterning 2D phononic crystals (PnCs) externally on the anchors. The PnCs serve as a frequency-selective reflector for outgoing acoustic waves through the tethers of the TPoS resonator. According to our experimental results, combining the PnCs with the conventional TPoS resonator significantly enhances the quality factor (Q) and correspondingly lowers the insertion loss (IL). The measured improvement is reproducible over multiple samples and consistent with the simulations by tuning the PnC bandgaps, suggesting significant reduction of acoustic leakage to the substrate by adopting the PnCs.

AB - We report an approach to suppress anchor loss in thin-film piezoelectric-on-silicon (TPoS) micromechanical (MEMS) resonators by patterning 2D phononic crystals (PnCs) externally on the anchors. The PnCs serve as a frequency-selective reflector for outgoing acoustic waves through the tethers of the TPoS resonator. According to our experimental results, combining the PnCs with the conventional TPoS resonator significantly enhances the quality factor (Q) and correspondingly lowers the insertion loss (IL). The measured improvement is reproducible over multiple samples and consistent with the simulations by tuning the PnC bandgaps, suggesting significant reduction of acoustic leakage to the substrate by adopting the PnCs.

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DO - 10.1109/MEMSYS.2015.7051079

M3 - RGC 32 - Refereed conference paper (with host publication)

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SN - 978-1-4799-7956-1

SP - 797

EP - 800

BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

PB - IEEE

T2 - 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)

Y2 - 18 January 2015 through 22 January 2015

ER -

AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors

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