Abstract
We present aluminum nitride (AlN) on silicon (Si) CMOS-compatible piezoelectric micromachined ultrasonic transducers (pMUTs) with an extended detection range of up to 140 cm for touchless sensing applications. The reported performance surpasses the current state-of-art for AlN-based pMUTs in terms of the maximum range of detection using just a pair of pMUTs (as opposed to an array of pMUTs). The extended range of detection has been realized by using a larger diaphragm allowed by fabricating a thicker diaphragm than most other pMUTs reported to date. Using a pair of pMUTs, we experimentally demonstrate the capability of range-finding by correlating the time-of-flight (TOF) between the transmit (TX) and receive (RX) pulse. The results were obtained using an experimental setup where the MEMS chip was interconnected with a customized printed circuit board (PCB) using Al wire bonds.
| Original language | English |
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| Title of host publication | Proceedings - EUROSENSORS 2018 |
| Publisher | Multidisciplinary Digital Publishing Institute (MDPI) |
| Number of pages | 4 |
| Volume | 2 |
| ISBN (Print) | 2504-3900 |
| DOIs | |
| Publication status | Published - Sept 2018 |
| Event | 32nd Eurosensors Conference (EUROSENSORS 2018) - Graz, Austria Duration: 9 Sept 2018 → 12 Sept 2018 https://www.eurosensors2018.eu/ |
Conference
| Conference | 32nd Eurosensors Conference (EUROSENSORS 2018) |
|---|---|
| Place | Austria |
| City | Graz |
| Period | 9/09/18 → 12/09/18 |
| Internet address |
Research Keywords
- aluminum nitride (AlN)
- piezoelectric micromachined ultrasonic transducer (pMUT)
- touchless sensing
Publisher's Copyright Statement
- This full text is made available under CC-BY 4.0. https://creativecommons.org/licenses/by/4.0/