Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process

Alasatri Suresh; Ko Lok Mak; Jad Benserhir; Joshua E.-Y. Lee; Libor Rufer

doi:10.1109/SENSORS43011.2019.8956530

Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process

Alasatri Suresh^*, Ko Lok Mak, Jad Benserhir, Joshua E.-Y. Lee, Libor Rufer^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

13 Citations (Scopus)

Abstract

This work demonstrates the feasibility of an ultrasonic rangefinder with a sensing range of up to 1.5m based on a single piezoelectric micromachined ultrasonic transducer (PMUT) fabricated using a multi-user MEMS process (MUMPs). The dual-electrode design presented herein has been used to isolate the transmit (TX) and received (RX) paths within a single PMUT, thereby avoiding issues of frequency mismatch that is common to dual-PMUT designs. The reported ultrasonic rangefinder has a minimum detection limit of 0.3m.

Original language	English
Title of host publication	2019 IEEE SENSORS Proceedings
Publisher	IEEE
ISBN (Electronic)	978-1-7281-1634-1
DOIs	https://doi.org/10.1109/SENSORS43011.2019.8956530
Publication status	Published - Oct 2019
Event	18th IEEE Sensors, SENSORS 2019 - Montreal, Canada Duration: 27 Oct 2019 → 30 Oct 2019

Publication series

Name	Proceedings of IEEE Sensors
Volume	2019-October
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	18th IEEE Sensors, SENSORS 2019
Place	Canada
City	Montreal
Period	27/10/19 → 30/10/19

Research Keywords

dual-electrode PMUT
multi-user MEMS process
ultrasonic rangefinder

Access Output

10.1109/SENSORS43011.2019.8956530

Other Access Options

Check CityUHK Library

Permanent Link

Right click to copy link

Cite this

Suresh, A., Mak, K. L., Benserhir, J., Lee, J. E.-Y., & Rufer, L. (2019). Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process. In 2019 IEEE SENSORS Proceedings Article 8956530 (Proceedings of IEEE Sensors; Vol. 2019-October). IEEE. https://doi.org/10.1109/SENSORS43011.2019.8956530

@inproceedings{a6f7d07c50cb4d48985ad847c8dde618,

title = "Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process",

abstract = "This work demonstrates the feasibility of an ultrasonic rangefinder with a sensing range of up to 1.5m based on a single piezoelectric micromachined ultrasonic transducer (PMUT) fabricated using a multi-user MEMS process (MUMPs). The dual-electrode design presented herein has been used to isolate the transmit (TX) and received (RX) paths within a single PMUT, thereby avoiding issues of frequency mismatch that is common to dual-PMUT designs. The reported ultrasonic rangefinder has a minimum detection limit of 0.3m.",

keywords = "dual-electrode PMUT, multi-user MEMS process, ultrasonic rangefinder",

author = "Alasatri Suresh and Mak, {Ko Lok} and Jad Benserhir and Lee, {Joshua E.-Y.} and Libor Rufer",

year = "2019",

month = oct,

doi = "10.1109/SENSORS43011.2019.8956530",

language = "English",

series = "Proceedings of IEEE Sensors",

publisher = "IEEE",

booktitle = "2019 IEEE SENSORS Proceedings",

address = "United States",

note = "18th IEEE Sensors, SENSORS 2019 ; Conference date: 27-10-2019 Through 30-10-2019",

}

Suresh, A, Mak, KL, Benserhir, J, Lee, JE-Y & Rufer, L 2019, Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process. in 2019 IEEE SENSORS Proceedings., 8956530, Proceedings of IEEE Sensors, vol. 2019-October, IEEE, 18th IEEE Sensors, SENSORS 2019, Montreal, Canada, 27/10/19. https://doi.org/10.1109/SENSORS43011.2019.8956530

Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process. / Suresh, Alasatri; Mak, Ko Lok; Benserhir, Jad et al.
2019 IEEE SENSORS Proceedings. IEEE, 2019. 8956530 (Proceedings of IEEE Sensors; Vol. 2019-October).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process

AU - Suresh, Alasatri

AU - Mak, Ko Lok

AU - Benserhir, Jad

AU - Lee, Joshua E.-Y.

AU - Rufer, Libor

PY - 2019/10

Y1 - 2019/10

N2 - This work demonstrates the feasibility of an ultrasonic rangefinder with a sensing range of up to 1.5m based on a single piezoelectric micromachined ultrasonic transducer (PMUT) fabricated using a multi-user MEMS process (MUMPs). The dual-electrode design presented herein has been used to isolate the transmit (TX) and received (RX) paths within a single PMUT, thereby avoiding issues of frequency mismatch that is common to dual-PMUT designs. The reported ultrasonic rangefinder has a minimum detection limit of 0.3m.

AB - This work demonstrates the feasibility of an ultrasonic rangefinder with a sensing range of up to 1.5m based on a single piezoelectric micromachined ultrasonic transducer (PMUT) fabricated using a multi-user MEMS process (MUMPs). The dual-electrode design presented herein has been used to isolate the transmit (TX) and received (RX) paths within a single PMUT, thereby avoiding issues of frequency mismatch that is common to dual-PMUT designs. The reported ultrasonic rangefinder has a minimum detection limit of 0.3m.

KW - dual-electrode PMUT

KW - multi-user MEMS process

KW - ultrasonic rangefinder

UR - http://www.scopus.com/inward/record.url?scp=85078694565&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-85078694565&origin=recordpage

U2 - 10.1109/SENSORS43011.2019.8956530

DO - 10.1109/SENSORS43011.2019.8956530

M3 - RGC 32 - Refereed conference paper (with host publication)

T3 - Proceedings of IEEE Sensors

BT - 2019 IEEE SENSORS Proceedings

PB - IEEE

T2 - 18th IEEE Sensors, SENSORS 2019

Y2 - 27 October 2019 through 30 October 2019

ER -

Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process

Abstract

Publication series

Conference

Research Keywords

Access Output

Other Access Options

Permanent Link

Other Files and Links

Fingerprint

Cite this