Adaptive run to run control for intermittent batch operations

S. Joe Qin; Glen W. Scheid; Terrence J. Riley

doi:10.1109/ACC.2002.1023958

Adaptive run to run control for intermittent batch operations

S. Joe Qin
, Glen W. Scheid
, Terrence J. Riley

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

2 Citations (Scopus)

Abstract

Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at AMD. The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.

Original language	English
Title of host publication	Proceedings of the 2002 American Control Conference
Publisher	IEEE
Pages	2168-2173
Volume	3
ISBN (Electronic)	0780372999
ISBN (Print)	0780372980
DOIs	https://doi.org/10.1109/ACC.2002.1023958
Publication status	Published - May 2002
Externally published	Yes
Event	2002 American Control Conference (ACC 2002) - Anchorage, United States Duration: 8 May 2002 → 10 May 2002 https://ieeexplore.ieee.org/iel5/7965/22015/01023120.pdf

Publication series

Name	Proceedings of the American Control Conference
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISSN (Print)	0743-1619

Conference

Conference	2002 American Control Conference (ACC 2002)
Place	United States
City	Anchorage
Period	8/05/02 → 10/05/02
Internet address	https://ieeexplore.ieee.org/iel5/7965/22015/01023120.pdf

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This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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10.1109/ACC.2002.1023958

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title = "Adaptive run to run control for intermittent batch operations",

abstract = "Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at AMD. The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.",

author = "Qin, \{S. Joe\} and Scheid, \{Glen W.\} and Riley, \{Terrence J.\}",

year = "2002",

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doi = "10.1109/ACC.2002.1023958",

language = "English",

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volume = "3",

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publisher = "IEEE",

pages = "2168--2173",

booktitle = "Proceedings of the 2002 American Control Conference",

address = "United States",

note = "2002 American Control Conference (ACC 2002) ; Conference date: 08-05-2002 Through 10-05-2002",

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Adaptive run to run control for intermittent batch operations. / Qin, S. Joe; Scheid, Glen W.; Riley, Terrence J.
Proceedings of the 2002 American Control Conference. Vol. 3 IEEE, 2002. p. 2168-2173 (Proceedings of the American Control Conference).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

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AU - Scheid, Glen W.

AU - Riley, Terrence J.

PY - 2002/5

Y1 - 2002/5

N2 - Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at AMD. The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.

AB - Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at AMD. The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.

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DO - 10.1109/ACC.2002.1023958

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0780372980

VL - 3

T3 - Proceedings of the American Control Conference

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EP - 2173

BT - Proceedings of the 2002 American Control Conference

PB - IEEE

T2 - 2002 American Control Conference (ACC 2002)

Y2 - 8 May 2002 through 10 May 2002

ER -

Adaptive run to run control for intermittent batch operations

Abstract

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