Acoustofluidic localization of sparse particles on a piezoelectric resonant sensor for nanogram-scale mass measurements

The ability to weigh microsubstances present in low concentrations is an important tool for environmental monitoring and chemical analysis. For instance, developing a rapid analysis platform that identifies the material type of microplastics in seawater would help evaluate the potential toxicity to marine organisms. In this study, we demonstrate the integration of two different techniques that bring together the functions of sparse particle localization and miniaturized mass sensing on a microelectromechanical system (MEMS) chip for enhanced detection and minimization of negative measurements. The droplet sample for analysis is loaded onto the MEMS chip containing a resonant mass sensor. Through the coupling of a surface acoustic wave (SAW) from a SAW transducer into the chip, the initially dispersed microparticles in the droplet are localized over the detection area of the MEMS sensor, which is only 200 µm wide. The accreted mass of the particles is then calibrated against the resulting shift in resonant frequency of the sensor. The SAW device and MEMS chip are detachable after use, allowing the reuse of the SAW device part of the setup instead of the disposal of both parts. Our platform maintains the strengths of noncontact and label-free dual-chip acoustofluidic devices, demonstrating for the first time an integrated microparticle manipulation and real-time mass measurement platform useful for the analysis of sparse microsubstances.