A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

23 Scopus Citations
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Author(s)

  • Qiulin Tan
  • Jun Liu
  • Liwei Lin
  • Jijun Xiong

Detail(s)

Original languageEnglish
Article number7815284
Pages (from-to)351-356
Journal / PublicationJournal of Microelectromechanical Systems
Volume26
Issue number2
Online published16 Jan 2017
Publication statusPublished - Apr 2017

Abstract

This paper presents a passive wireless sensor for simultaneously and remotely measuring pressure and temperature under harsh environments. The sensor consists of a dual LC (inductor and capacitor) resonant circuit, one without a cavity and the other with a cavity capacitor for temperature and pressure sensing, respectively. The low-temperature co-fired ceramic technology is used to fabricate the sensor, making it suitable for high-temperature harsh environment operations. Experimental results show the prototype sensor has temperature sensitivity of 8.15 kHz/°C and pressure sensitivity of 1.96 MHz/Bar up to 400°C.

Research Area(s)

  • dual LC resonant circuit, Harsh environments, LTCC, passive wireless sensor

Citation Format(s)