A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments

Qiulin Tan; Tao Luo; Tanyong Wei; Jun Liu; Liwei Lin; Jijun Xiong

doi:10.1109/JMEMS.2016.2642580

Author(s)

Qiulin Tan
Jun Liu
Liwei Lin
Jijun Xiong

Detail(s)

Original language	English
Pages (from-to)	351-356
Journal / Publication	Journal of Microelectromechanical Systems
Volume	26
Issue number	2
Online published	16 Jan 2017
Publication status	Published - Apr 2017

Link(s)

DOI	DOI https://doi.org/10.1109/JMEMS.2016.2642580 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-85009895649&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(a0fe6c4f-c961-4904-bfb5-4024dfdf94fd).html

Abstract

This paper presents a passive wireless sensor for simultaneously and remotely measuring pressure and temperature under harsh environments. The sensor consists of a dual LC (inductor and capacitor) resonant circuit, one without a cavity and the other with a cavity capacitor for temperature and pressure sensing, respectively. The low-temperature co-fired ceramic technology is used to fabricate the sensor, making it suitable for high-temperature harsh environment operations. Experimental results show the prototype sensor has temperature sensitivity of 8.15 kHz/°C and pressure sensitivity of 1.96 MHz/Bar up to 400°C. © 2017 IEEE

Research Area(s)

dual LC resonant circuit, Harsh environments, LTCC, passive wireless sensor

Citation Format(s)

[ RIS ] [ BibTeX ]

A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments. / Tan, Qiulin; Luo, Tao ; Wei, Tanyong et al.
In: Journal of Microelectromechanical Systems, Vol. 26, No. 2, 04.2017, p. 351-356.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Tan, Q, Luo, T , Wei, T, Liu, J, Lin, L & Xiong, J 2017, 'A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments', Journal of Microelectromechanical Systems, vol. 26, no. 2, pp. 351-356. https://doi.org/10.1109/JMEMS.2016.2642580

Tan, Q., Luo, T., Wei, T., Liu, J., Lin, L., & Xiong, J. (2017). A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments. Journal of Microelectromechanical Systems, 26(2), 351-356. https://doi.org/10.1109/JMEMS.2016.2642580

Tan Q, Luo T , Wei T, Liu J, Lin L, Xiong J. A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments. Journal of Microelectromechanical Systems. 2017 Apr;26(2):351-356. Epub 2017 Jan 16. doi: 10.1109/JMEMS.2016.2642580

Tan, Qiulin ; Luo, Tao ; Wei, Tanyong et al. / A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments. In: Journal of Microelectromechanical Systems. 2017 ; Vol. 26, No. 2. pp. 351-356.