A two-plane-parallel fixed electrodes micromachined tunable oscillator

Y. C. Loke; A. Q. Liu; K. M. Liew; Q. Zou

doi:10.1117/12.425368

A two-plane-parallel fixed electrodes micromachined tunable oscillator

Y. C. Loke, A. Q. Liu, K. M. Liew, Q. Zou

Research output: Journal Publications and Reviews › RGC 22 - Publication in policy or professional journal

Abstract

High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.

Original language	English
Pages (from-to)	430-437
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4408
DOIs	https://doi.org/10.1117/12.425368
Publication status	Published - 2001
Externally published	Yes
Event	Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes, France Duration: 25 Apr 2001 → 27 Apr 2001

Research Keywords

Bandpass filter
RF MEMS
Superheterodyne receiver and tunable oscillators

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title = "A two-plane-parallel fixed electrodes micromachined tunable oscillator",

abstract = "High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.",

keywords = "Bandpass filter, RF MEMS, Superheterodyne receiver and tunable oscillators",

author = "Loke, {Y. C.} and Liu, {A. Q.} and Liew, {K. M.} and Q. Zou",

year = "2001",

doi = "10.1117/12.425368",

language = "English",

volume = "4408",

pages = "430--437",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE - International Society for Optical Engineering",

note = "Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 ; Conference date: 25-04-2001 Through 27-04-2001",

}

TY - JOUR

T1 - A two-plane-parallel fixed electrodes micromachined tunable oscillator

AU - Loke, Y. C.

AU - Liu, A. Q.

AU - Liew, K. M.

AU - Zou, Q.

PY - 2001

Y1 - 2001

N2 - High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.

AB - High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.

KW - Bandpass filter

KW - RF MEMS

KW - Superheterodyne receiver and tunable oscillators

UR - http://www.scopus.com/inward/record.url?scp=0034866618&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0034866618&origin=recordpage

U2 - 10.1117/12.425368

DO - 10.1117/12.425368

M3 - RGC 22 - Publication in policy or professional journal

SN - 0277-786X

VL - 4408

SP - 430

EP - 437

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

Y2 - 25 April 2001 through 27 April 2001

ER -

A two-plane-parallel fixed electrodes micromachined tunable oscillator

Abstract

Research Keywords

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