A study of vanadium as diffusion barrier between aluminum and gadolinium silicide contacts

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

100
Film Material Science
100
Aluminum Material Science
100
Schottky Barrier Material Science
100
Silicide Material Science
100
Vanadium Material Science
100
Gadolinium Material Science
50
Temperature Material Science
50
Devices Material Science
50
Heat Treatment Material Science
50
Thin Film Structure Material Science

Keyphrases

100
Vanadium Keyphrases
100
Diffusion Barrier Keyphrases
100
Gadolinium Silicide... Keyphrases
33
Si Substrate Keyphrases
33
Diffraction Keyphrases
33
High Temperature Keyphrases
33
Heat Treatment Keyphrases
33
Current-voltage Mea... Keyphrases
33
Layered Structure Keyphrases
33
Schottky Barrier He... Keyphrases
33
Schottky Contact Keyphrases
33
Structural Change Keyphrases
33
Interdiffusion Keyphrases
33
Backscatter Keyphrases
33
Low Barrier Keyphrases
33
Formation Process Keyphrases
33
Si Devices Keyphrases
33
Thin Film Structure Keyphrases
33
Multilayered Films Keyphrases
33
Processing Scheme Keyphrases
33
Compound Formation Keyphrases
33
Compositional Chang... Keyphrases
33
P-type Si Keyphrases
33
Vanadium Films Keyphrases
33
Metastable Compound... Keyphrases

INIS

100
vanadium INIS
100
diffusion barriers INIS
100
gadolinium silicide... INIS
100
aluminium silicides INIS
50
films INIS
50
substrates INIS
50
barriers INIS
25
implementation INIS
25
processing INIS
25
x-ray diffraction INIS
25
layers INIS
25
stability INIS
25
thin films INIS
25
high temperature INIS
25
voltage INIS
25
deposition INIS
25
heat treatments INIS
25
devices INIS
25
height INIS
25
backscattering INIS
Research OutputsResearch Output authored by A study of vanadium as diffusion barrier between aluminum and gadolinium silicide contacts is tagged with the concept