A STUDY OF SINGLE AND MULTILAYER DLC FILM PREPARED BY RF PLASMA AND FILTERED CATHODIC ARC

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - Sept 2005
Event	The 8th International Workshop on Plasma-based Ion Implantation and Deposition - Southwest Jiaotong University, Chengdu, China Duration: 18 Sept 2005 → 22 Sept 2005

Conference	The 8th International Workshop on Plasma-based Ion Implantation and Deposition
Place	China
City	Chengdu
Period	18/09/05 → 22/09/05

Other Access Options

@conference{fe4f22ed392a4500a3e728f6d1bb1feb,

title = "A STUDY OF SINGLE AND MULTILAYER DLC FILM PREPARED BY RF PLASMA AND FILTERED CATHODIC ARC",

author = "Ha, \{Peter C.T.\} and D.R. McKenzie and M.M.M. Bilek and P.K. Chu and B.K. Tay",

year = "2005",

month = sep,

language = "English",

note = "The 8th International Workshop on Plasma-based Ion Implantation and Deposition ; Conference date: 18-09-2005 Through 22-09-2005",

}

A STUDY OF SINGLE AND MULTILAYER DLC FILM PREPARED BY RF PLASMA AND FILTERED CATHODIC ARC. / Ha, Peter C.T.; McKenzie, D.R.; Bilek, M.M.M. et al.
2005. Paper presented at The 8th International Workshop on Plasma-based Ion Implantation and Deposition, Chengdu, China.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - A STUDY OF SINGLE AND MULTILAYER DLC FILM PREPARED BY RF PLASMA AND FILTERED CATHODIC ARC

AU - Ha, Peter C.T.

AU - McKenzie, D.R.

AU - Bilek, M.M.M.

AU - Chu, P.K.

AU - Tay, B.K.

PY - 2005/9

Y1 - 2005/9

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - The 8th International Workshop on Plasma-based Ion Implantation and Deposition

Y2 - 18 September 2005 through 22 September 2005

ER -