TY - JOUR
T1 - A study of fundamental mechanisms of Si-B-N composite films deposited by duplex treatment
AU - Wang, Chengbiao
AU - Yu, Xiang
AU - Yu, Junfeng
AU - Meng, Hua
PY - 2003/7/25
Y1 - 2003/7/25
N2 - In this study, a new kind of Si-B-N composite film was deposited on 1045 steel with good adhesion by radio frequency-direct current-plasma enhanced chemical vapor deposition and then was analyzed by X-ray photoelectron spectroscopy and X-ray diffractometry. The results indicate that through the appropriate control of process parameters, especially applying a DC negative bias voltage to the substrate, the Si-B-N composite film with a mixed phase of h-BN and c-BN crystal is obtained. The film was produced by duplex treatment, and its performance was then evaluated. The effects of the applied negative bias on the BN content, adhesion strength, microhardness, and friction coefficient were also investigated. © 2003 Elsevier Science Ltd. All rights reserved.
AB - In this study, a new kind of Si-B-N composite film was deposited on 1045 steel with good adhesion by radio frequency-direct current-plasma enhanced chemical vapor deposition and then was analyzed by X-ray photoelectron spectroscopy and X-ray diffractometry. The results indicate that through the appropriate control of process parameters, especially applying a DC negative bias voltage to the substrate, the Si-B-N composite film with a mixed phase of h-BN and c-BN crystal is obtained. The film was produced by duplex treatment, and its performance was then evaluated. The effects of the applied negative bias on the BN content, adhesion strength, microhardness, and friction coefficient were also investigated. © 2003 Elsevier Science Ltd. All rights reserved.
KW - Duplex treatment
KW - Negative bias voltage
KW - Si-B-N composite thin film
KW - Tribological performance
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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0037774789&origin=recordpage
U2 - 10.1016/S0042-207X(03)00014-9
DO - 10.1016/S0042-207X(03)00014-9
M3 - RGC 21 - Publication in refereed journal
SN - 0924-1868
VL - 71
SP - 451
EP - 457
JO - User Modeling and User-Adapted Interaction
JF - User Modeling and User-Adapted Interaction
IS - 4
ER -