A single-crystal-silicon bulk-acoustic-mode microresonator oscillator
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Author(s)
Detail(s)
Original language | English |
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Pages (from-to) | 701-703 |
Journal / Publication | IEEE Electron Device Letters |
Volume | 29 |
Issue number | 7 |
Publication status | Published - Jul 2008 |
Externally published | Yes |
Link(s)
Abstract
A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb. © 2008 IEEE.
Research Area(s)
- Allan deviation, Bulk acoustic resonators, High quality factor, MEMS oscillator, Single-crystal silicon (SCS)
Citation Format(s)
A single-crystal-silicon bulk-acoustic-mode microresonator oscillator. / Lee, Joshua E.-Y.; Bahreyni, Bahreyni; Zhu, Yong et al.
In: IEEE Electron Device Letters, Vol. 29, No. 7, 07.2008, p. 701-703.
In: IEEE Electron Device Letters, Vol. 29, No. 7, 07.2008, p. 701-703.
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review