A single-crystal-silicon bulk-acoustic-mode microresonator oscillator

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)701-703
Journal / PublicationIEEE Electron Device Letters
Volume29
Issue number7
Publication statusPublished - Jul 2008
Externally publishedYes

Abstract

A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb. © 2008 IEEE.

Research Area(s)

  • Allan deviation, Bulk acoustic resonators, High quality factor, MEMS oscillator, Single-crystal silicon (SCS)

Citation Format(s)

A single-crystal-silicon bulk-acoustic-mode microresonator oscillator. / Lee, Joshua E.-Y.; Bahreyni, Bahreyni; Zhu, Yong et al.
In: IEEE Electron Device Letters, Vol. 29, No. 7, 07.2008, p. 701-703.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review