A single-crystal-silicon bulk-acoustic-mode microresonator oscillator

Joshua E.-Y. Lee; Bahreyni Bahreyni; Yong Zhu; Ashwin A. Seshia

doi:10.1109/LED.2008.2000643

A single-crystal-silicon bulk-acoustic-mode microresonator oscillator

Joshua E.-Y. Lee, Bahreyni Bahreyni, Yong Zhu, Ashwin A. Seshia

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

63 Citations (Scopus)

Abstract

A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb. © 2008 IEEE.

Original language	English
Pages (from-to)	701-703
Journal	IEEE Electron Device Letters
Volume	29
Issue number	7
DOIs	https://doi.org/10.1109/LED.2008.2000643
Publication status	Published - Jul 2008
Externally published	Yes

Research Keywords

Allan deviation
Bulk acoustic resonators
High quality factor
MEMS oscillator
Single-crystal silicon (SCS)

Access Output

10.1109/LED.2008.2000643

Other Access Options

Check CityUHK Library

Permanent Link

Right click to copy link

Cite this

@article{4a2c75f5d0644bf887c10f08e579da91,

title = "A single-crystal-silicon bulk-acoustic-mode microresonator oscillator",

abstract = "A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb. {\textcopyright} 2008 IEEE.",

keywords = "Allan deviation, Bulk acoustic resonators, High quality factor, MEMS oscillator, Single-crystal silicon (SCS)",

author = "Lee, {Joshua E.-Y.} and Bahreyni Bahreyni and Yong Zhu and Seshia, {Ashwin A.}",

year = "2008",

month = jul,

doi = "10.1109/LED.2008.2000643",

language = "English",

volume = "29",

pages = "701--703",

journal = "IEEE Electron Device Letters",

issn = "0741-3106",

publisher = "IEEE",

number = "7",

}

TY - JOUR

T1 - A single-crystal-silicon bulk-acoustic-mode microresonator oscillator

AU - Lee, Joshua E.-Y.

AU - Bahreyni, Bahreyni

AU - Zhu, Yong

AU - Seshia, Ashwin A.

PY - 2008/7

Y1 - 2008/7

N2 - A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb. © 2008 IEEE.

AB - A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb. © 2008 IEEE.

KW - Allan deviation

KW - Bulk acoustic resonators

KW - High quality factor

KW - MEMS oscillator

KW - Single-crystal silicon (SCS)

UR - http://www.scopus.com/inward/record.url?scp=47249163331&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-47249163331&origin=recordpage

U2 - 10.1109/LED.2008.2000643

DO - 10.1109/LED.2008.2000643

M3 - RGC 21 - Publication in refereed journal

SN - 0741-3106

VL - 29

SP - 701

EP - 703

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 7

ER -

A single-crystal-silicon bulk-acoustic-mode microresonator oscillator

Abstract

Research Keywords

Access Output

Other Access Options

Permanent Link

Other Files and Links

Fingerprint

Cite this