A semi-analytical modeling approach for laterally-vibrating thin-film piezoelectric-on-silicon micromechanical resonators

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Overview

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Material Science

Silicon Material Science

Resonator Material Science

Thin Films Material Science

Piezoelectricity Material Science

Analytical Modeling Material Science

Finite Element Meth... Material Science

Film Material Science

Capacitance Material Science

Modal Analysis Material Science

Engineering

Resonator Engineering

Thin Films Engineering

Mode Shape Engineering

Piezoelectric Engineering

Sine Function Engineering

Lumped Parameter Engineering

Modal Analysis Engineering

Analytical Model Engineering

Accurate Prediction Engineering

Measured Result Engineering

Finite Element Simu... Engineering

Piezoelectric Effec... Engineering

Electromechanical B... Engineering

Electrical Domain Engineering

Coupled Domain Engineering

Finite Element Anal... Engineering

Vibration Mode Engineering

Research OutputsResearch Output authored by A semi-analytical modeling approach for laterally-vibrating thin-film piezoelectric-on-silicon micromechanical resonators is tagged with the concept

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