A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

Xiaopeng Sha; Hui Sun; Yuliang Zhao; Wenchao Li; Wen J. Li

doi:10.3390/mi10120843

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

Xiaopeng Sha, Hui Sun, Yuliang Zhao^*, Wenchao Li, Wen J. Li^*

^*Corresponding author for this work

Department of Mechanical Engineering

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

31 Citations (Scopus)

45 Downloads (CityUHK Scholars)

Abstract

Micromanipulation is an interdisciplinary technology that integrates advanced knowledge of microscale/nanoscale science, mechanical engineering, electronic engineering, and control engineering. Over the past two decades, it has been widely applied in the fields of MEMS (microelectromechanical systems), bioengineering, and microdevice integration and manufacturing. Microvision servoing is the basic tool for enabling the automatic and precise micromanipulation of microscale/nanoscale entities. However, there are still many problems surrounding microvision servoing in theory and the application of this technology's micromanipulation processes. This paper summarizes the research, development status, and practical applications of critical components of microvision servoing for micromanipulation, including geometric calibration, autofocus techniques, depth information, and visual servoing control. Suggestions for guiding future innovation and development in this field are also provided in this review.

Original language	English
Article number	843
Journal	Micromachines
Volume	10
Issue number	12
Online published	2 Dec 2019
DOIs	https://doi.org/10.3390/mi10120843
Publication status	Published - Dec 2019

Research Keywords

Autofocus
Calibration
Microlens
Micromanipulation
Visual servoing control

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This full text is made available under CC-BY 4.0. https://creativecommons.org/licenses/by/4.0/

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This output contributes to the following UN Sustainable Development Goals (SDGs)

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title = "A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly",

abstract = "Micromanipulation is an interdisciplinary technology that integrates advanced knowledge of microscale/nanoscale science, mechanical engineering, electronic engineering, and control engineering. Over the past two decades, it has been widely applied in the fields of MEMS (microelectromechanical systems), bioengineering, and microdevice integration and manufacturing. Microvision servoing is the basic tool for enabling the automatic and precise micromanipulation of microscale/nanoscale entities. However, there are still many problems surrounding microvision servoing in theory and the application of this technology's micromanipulation processes. This paper summarizes the research, development status, and practical applications of critical components of microvision servoing for micromanipulation, including geometric calibration, autofocus techniques, depth information, and visual servoing control. Suggestions for guiding future innovation and development in this field are also provided in this review.",

keywords = "Autofocus, Calibration, Microlens, Micromanipulation, Visual servoing control",

author = "Xiaopeng Sha and Hui Sun and Yuliang Zhao and Wenchao Li and Li, {Wen J.}",

year = "2019",

month = dec,

doi = "10.3390/mi10120843",

language = "English",

volume = "10",

journal = "Micromachines",

issn = "2072-666X",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

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T1 - A Review on Microscopic Visual Servoing for Micromanipulation Systems

T2 - Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

AU - Sha, Xiaopeng

AU - Sun, Hui

AU - Zhao, Yuliang

AU - Li, Wenchao

AU - Li, Wen J.

PY - 2019/12

Y1 - 2019/12

N2 - Micromanipulation is an interdisciplinary technology that integrates advanced knowledge of microscale/nanoscale science, mechanical engineering, electronic engineering, and control engineering. Over the past two decades, it has been widely applied in the fields of MEMS (microelectromechanical systems), bioengineering, and microdevice integration and manufacturing. Microvision servoing is the basic tool for enabling the automatic and precise micromanipulation of microscale/nanoscale entities. However, there are still many problems surrounding microvision servoing in theory and the application of this technology's micromanipulation processes. This paper summarizes the research, development status, and practical applications of critical components of microvision servoing for micromanipulation, including geometric calibration, autofocus techniques, depth information, and visual servoing control. Suggestions for guiding future innovation and development in this field are also provided in this review.

AB - Micromanipulation is an interdisciplinary technology that integrates advanced knowledge of microscale/nanoscale science, mechanical engineering, electronic engineering, and control engineering. Over the past two decades, it has been widely applied in the fields of MEMS (microelectromechanical systems), bioengineering, and microdevice integration and manufacturing. Microvision servoing is the basic tool for enabling the automatic and precise micromanipulation of microscale/nanoscale entities. However, there are still many problems surrounding microvision servoing in theory and the application of this technology's micromanipulation processes. This paper summarizes the research, development status, and practical applications of critical components of microvision servoing for micromanipulation, including geometric calibration, autofocus techniques, depth information, and visual servoing control. Suggestions for guiding future innovation and development in this field are also provided in this review.

KW - Autofocus

KW - Calibration

KW - Microlens

KW - Micromanipulation

KW - Visual servoing control

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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-85079071441&origin=recordpage

U2 - 10.3390/mi10120843

DO - 10.3390/mi10120843

M3 - RGC 21 - Publication in refereed journal

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SN - 2072-666X

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JO - Micromachines

JF - Micromachines

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ER -

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

Abstract

Research Keywords

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UN SDGs

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GRF: Nanolens-Array-Based Fast Scanning Near-Field Optical System for Large Area Nanoscale Imaging

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A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

Abstract

Research Keywords

Publisher's Copyright Statement

UN SDGs

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GRF: Nanolens-Array-Based Fast Scanning Near-Field Optical System for Large Area Nanoscale Imaging

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