A Review of Compliance Design for Semiconductor Fabrication Equipment
Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
| Original language | English |
|---|---|
| Title of host publication | 2021 IEEE International Symposium on Product Compliance Engineering - Asia (ISPCE-ASIA) |
| Publisher | IEEE |
| Number of pages | 6 |
| ISBN (Electronic) | 9781665443425 |
| ISBN (Print) | 978-1-6654-4343-2 |
| Publication status | Published - 2021 |
Publication series
| Name | ISPCE-ASIA - IEEE International Symposium on Product Compliance Engineering-Asia, Proceeding |
|---|
Conference
| Title | 2021 IEEE International Symposium on Product Compliance Engineering-Asia (ISPCE-ASIA 2021) |
|---|---|
| Location | National Taiwan Normal University |
| Place | Taiwan |
| City | Taipei |
| Period | 30 November - 1 December 2021 |
Link(s)
Abstract
In order to fulfill a great demand of IoT and 5G technology, more and more Semiconductor Fabrication Equipment (SFE) have been manufactured. The fastest and most accurate machinery have been launched to the semiconductor industry. Without stringent and smart manufacturing consideration, it would lead the customers' safety risk. This review article introduces the newest European Union (EU) and United States (US) regulatory requirement and propose a detail compliant design rationale for SFE manufacturer. This article is a comprehensive tool for designer to understand the compliance design solution and implementation measures.
Research Area(s)
- Compliance Design, Designers, Electromagnetic Compatibility, Manufacturing, Risk, Safety, Semiconductor Fabrication Equipment
Bibliographic Note
Full text of this publication does not contain sufficient affiliation information. With consent from the author(s) concerned, the Research Unit(s) information for this record is based on the existing academic department affiliation of the author(s).
Citation Format(s)
A Review of Compliance Design for Semiconductor Fabrication Equipment. / Chan, George; Lee, Chi Chung; Wei, Yang et al.
2021 IEEE International Symposium on Product Compliance Engineering - Asia (ISPCE-ASIA). IEEE, 2021. (ISPCE-ASIA - IEEE International Symposium on Product Compliance Engineering-Asia, Proceeding).
2021 IEEE International Symposium on Product Compliance Engineering - Asia (ISPCE-ASIA). IEEE, 2021. (ISPCE-ASIA - IEEE International Symposium on Product Compliance Engineering-Asia, Proceeding).
Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45) › 32_Refereed conference paper (with host publication) › peer-review
