A PMMA-based micro pressure sensor chip using carbon nanotubes as sensing elements

Research output: Journal Publications and Reviews › RGC 22 - Publication in policy or professional journal

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Author(s)

Detail(s)

Original languageEnglish
Article numberTPa2
Pages (from-to)251-254
Journal / PublicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2005
Externally publishedYes

Conference

Title18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
PlaceUnited States
CityMiami Beach, FL
Period30 January - 3 February 2005

Link(s)

DOI

DOI
Check@CityULib
Link to Scopus https://www.scopus.com/record/display.uri?eid=2-s2.0-26844528588&origin=recordpage
Permanent Link https://scholars.cityu.edu.hk/en/publications/publication(48e92f1a-5234-4b0c-8d36-01b5ba05224b).html

Abstract

A novel polymer-based MEMS pressure sensor was fabricated using bulk multi-walled carbon nanotube (MWNT) as piezoresistive sensing elements. The development of the pressure sensor includes fabrication of 300nm thick Polymethylmethacrylate (PMMA) diaphragms using SU8 molding/hot-embossing technique and AC electrophoretic manipulation of MWNT bundles on the diaphragms. We have measured the pressure-resistance dependency of these MWNT-based micro sensors and preliminary results indicated that the MWNT sensors were capable of sensing input pressure variations. Moreover, the I-V measurements of the resulting devices revealed that the nominal resistance of the sensing elements can be adjusted by annealing the MWNTs through electrical current heating, which offers a potential method for resistance-off set calibration. Based on these experimental evidences, we propose that carbon nanotubes (CNTs) is a novel material for fabricating micro pressure sensors on polymer substrates - which may serve as alternative sensors for silicon based pressure sensors when bio-compatibility and low-cost applications are required. © 2005 IEEE.

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Publication fingerprints text

100
sensors INIS
100
carbon nanotubes INIS
100
polymethylmethacryl... INIS
100
Carbon Nanotube Material Science
100
Sensing Element Engineering
100
Sensor Chip Engineering
100
Pressure Sensor Engineering
100
Carbon Nanotubes Keyphrases
100
Multi-walled Carbon... Keyphrases
100
Poly(methyl methacr... Keyphrases
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Citation Format(s)

[ RIS ] [ BibTeX ]
A PMMA-based micro pressure sensor chip using carbon nanotubes as sensing elements. / Fung, Carmen K. M.; Zhang, Maggie Q. H.; Chan, Rosa H. M. et al.
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2005, p. 251-254.

Research output: Journal Publications and Reviews › RGC 22 - Publication in policy or professional journal