A piezoelectric-on-silicon width-extensional mode Lorentz force resonant MEMS magnetometer

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

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Projects

GRF: VHF Piezoelectric Aluminum Nitride on Silicon Lamb Wave Mode Micromechanical Lorentz Force Magnetometers
LEE, E. J.
1/01/17 → 3/06/21
Project: Research